High-Repetition-Rate Excimer Laser for Semiconductor Manufacturing Inspection
High-repetition-rate excimer lasers for semiconductor manufacturing inspection are currently not domestically produced in China. Applications include: 1. Wavelength selection: Typical wavelengths are 193nm, 248nm and 308nm. These are widely used in semiconductor manufacturing; 193nm commonly serves photolithography, while 248nm/308nm serve other processes. 2. Repetition rate: Rates reach 1000Hz or higher, enabling repeated irradiation in a short time to improve production efficiency.
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