Prober Shuttle Platform
The Prober Shuttle Platform is a high-precision probing system designed for advanced failure analysis and current imaging applications. It features piezo-driven axes and submicron resolution, making it ideal for nanotechnology and semiconductor testing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Diameter | 140mm |
| Height | 10mm |
| Substage Travel X and Y | 9mm |
| Substage Travel Z | 0.7mm |
| Prober Travel X | 4.5mm |
| Prober Travel Y | 5mm |
| Prober Travel Z | 90° |
| Resolution Linear Axes | <0.5nm |
| Resolution Rotational Axes | <8nm |
| Speed | up to 1mm/s |
| Drift | <1nm/min |
| Cartesian Movement | Yes |
| No Backlash or Reversal Play | Yes |
| Coarse and Fine Displacement in One Drive | Yes |
| Noise | 20fA@1Hz |
| Insulation Leakage Current (Probes) | <50fA/V |
| Insulation Leakage Current (Sample) | <150fA/V |
| Signal Conductor Resistance | <5Ω |
| Maximum Voltage | 100V |
| Maximum Current | 100mA |
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Supplier Information
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