TS3500-SE
The TS3500-SE is a 300 mm automated probe system designed for accurate and reliable IV, CV, pulsed-IV, 1/f, and RF measurements. It features advanced EMI shielding, ultra-low noise IV measurements, and programmable microscope movements for test automation.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chuck XY Stage Travel Range | 310mm×530mm |
| Resolution | 0.0001° (0.24μm @ 300mm edge) |
| Accuracy | <2.0μm |
| Repeatability | <1.0μm |
| XY Stage Drive | Closed-loop high precision stepper motors |
| Speed | 10mm/sec to 20mm/sec |
| Chuck Z Stage Travel Range | 30mm |
| Z Stage Drive | Closed-loop high precision stepper motor |
| Chuck Theta Stage Travel Range | ±5° |
| Theta Stage Drive | High resolution stepper motor with linear encoder feedback system |
| Probe Platen Material | Nickel plated steel |
| Platen Cooling | Fully integrated CDA cooling |
| Configuration | Probe card holder 4.5×7" and/or MicroPositioners |
| Max. No. of MicroPositioners | 8x DC MicroPositioners or 4x DC + 4x RF MicroPositioner Setup |
| RF MicroPositioner Mounting | Magnetic with guided rail |
| DC MicroPositioner Mounting | Magnetic |
| EMI Shielding | >30dB (typical) @ 1kHz to 20GHz |
| Light Attenuation | ≥130dB |
| Spectral Noise Floor | ≤-180dBVrms/rtHz (≤1MHz) |
| System AC Noise | ≤5mVp-p (≤1GHz) |
Applications
Key Features
Datasheet
Supplier Information
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