MPI TS200-HP
The MPI TS200-HP is a 200 mm manual probe system designed for accurate and reliable high-power measurements up to 10 kV and 600 A. It features advanced EMI/RFI shielding, ergonomic design, and compatibility with various accessories for high voltage and high current applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Probe Station Dimensions | 900×1050×1930mm |
| Weight | ~500kg |
| Chuck XY Stage Travel Range | 225×260mm |
| Fine Travel Range | 25×25mm |
| Fine Travel Resolution | <1.0μm@500μm/rev |
| Planarity | <10μm |
| Theta Travel (Standard) | 360° |
| Theta Travel (Fine) | ±5.0° |
| Theta Resolution | 7.5×10^-3 gradient |
| Chuck Z Stage Travel | 5mm |
| Fine Travel Resolution (Z) | <1.0μm@500μm/rev |
| Load Stroke | 20mm, pneumatically |
| Microscope Movement Range | 50×50mm |
| Resolution | <5μm |
| Probe Platen Material | Nickel plated steel |
| Z-Height Movement Range | 20mm |
| Separation Repeatability | <1μm |
| Max. Number of MicroPositioners | 8 DC or 4 DC + 2 RF |
| Temperature range | -60°C to 300°C |
| Electrical Isolation | >10GΩ |
| Maximum Voltage | 10kV DC |
| Leakage Current | <6nA@10kV |
| Cooling Method | Air (user supplied) |
| Temperature Stability | ±0.08°C |
| Temperature Accuracy | 0.1°C |
| Interfaces | RS232C |
| Heating Rates | 25 to 300°C <40min |
| Cooling Rates | 300 to 25°C <30min |
Applications
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Datasheet
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