TS150 Manual Probe System
The TS150 is a 150 mm manual probe system designed for accurate and reliable DC/CV and RF measurements, offering high precision and flexibility for various applications.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Total Travel Range | 180x230mm (7.1x9.1in) |
| Fine Travel Range | 25x25mm fine micrometer control |
| Fine Travel Resolution | <1.0μm (0.04mils)@500μm/rev |
| Planarity | <10μm |
| Theta Travel (Standard) | 360° |
| Theta Travel (Fine) | ±5.0° |
| Theta Resolution | 7.5x10^-3 gradient |
| Movement | Puck controlled air bearing stage |
| Microscope Movement Range | 25x25mm (1x1in) |
| Microscope Resolution | N/A |
| Scope Lift | Manual, tilt-back |
| Microscope Movement | Air bearing control |
| Microscope Movement | fixed by vacuum |
| Probe Platen Material | Nickel plated steel |
| Probe Platen Dimensions | See drawing |
| Chuck Top to Platen Top | Min. 28mm |
| Max. No of MicroPositioners | 10 DC and 4 RF |
| Platen Lift Control | 3 positions - contact (0), separation (300μm), and loading (3mm) |
| Platen Z-Height Adjustment Range | Max. 20mm (0.8in) |
| Separation Repeatability | <1μm (0.04mils) by automated control |
| RF MicroPositioner Mounting | Magnetic with guided rail |
| DC MicroPositioner Mounting | Magnetic |
| Thermal Isolation | 300°C thermal isolation depends on chuck configuration |
| Non-Thermal Chuck Connectivity 1 | Coaxial chuck: Coax BNC (f) |
| Non-Thermal Chuck Connectivity 2 | Triaxial chuck: Kelvin Triax |
| Non-Thermal Chuck Diameter | 160mm |
| Non-Thermal Chuck Material | Stainless steel |
| Non-Thermal Chuck Surface | Planar with centric engraved vacuum grooves |
| Non-Thermal Chuck Vacuum Grooves Sections (Diameter) | 3, 27, 45, 69, 93, 117, 141mm |
| Non-Thermal Chuck Vacuum Actuation | Multizone control - All connected in meander shape, center hole in 3mm diameter |
| Supported DUT Sizes | Single DUTs down to 4x4mm size or wafers 50mm (2in) thru 150mm (6in) |
| Surface Planarity | ≤5μm |
| Rigidity | <15μm/10N@edge |
| Electrical Specification (Coax) Operation Voltage | In accordance with EC 61010, certificates for higher voltages available upon request |
| Electrical Specification (Coax) Maximum Voltage | 500V DC |
| Electrical Specification (Coax) Isolation | >2GΩ |
| Electrical Specification (Triax) Chuck Isolation | >100GΩ |
| Electrical Specification (Triax) Force to Guard | >100GΩ |
| Electrical Specification (Triax) Guard to Shield | >10GΩ |
| Electrical Specification (Triax) Force to Shield | >50GΩ |
| Thermal Chuck Connectivity | Coax BNC (f) |
| Temperature Control Method | Cooling air/Resistance heater |
| Coolant | Air (user supplied) |
| Smallest Temperature Selection Step | 0.1°C |
| Chuck Temperature Display Resolution | 0.1°C |
| Temperature Stability | ±0.5°C |
| Temperature Accuracy | ±1°C |
| Control Method | DC/PID |
| Interfaces | RS232C |
| Chuck Surface Plating | Nickel plated with pinhole surface |
| Temperature Sensor | Pt100 1/3DIN |
| Temperature Uniformity | <±1°C |
| Surface Flatness and Base Parallelism | <±15μm |
| Heating and Cooling Rates | 35 to 150°C <10min, 150 to 35°C <15min |
| Electrical Isolation | >0.5TΩ@25°C |
| Leakage @10V | N/A |
| Capacitance | <750pF |
| Maximum Voltage Between Chuck Top and GND | 500V DC |
Applications
Key Features
Datasheet
Supplier Information
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