TS3000-HP
The TS3000-HP is a 300 mm automated probe system designed for high-power measurements up to 10 kV and 600 A. It features advanced anti-arcing technologies, ergonomic design, and precise control systems for reliable testing.
Specification Snapshot
Chuck Dimensions
310 mm x 335 mm
Max Voltage
10 kV
Max Current
600 A
System Dimensions
1400 x 1300 x 1700 mm
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Overview
The TS3000-HP is a 300 mm automated probe system designed for high-power measurements up to 10 kV and 600 A. It features advanced anti-arcing technologies, ergonomic design, and precise control systems for reliable testing.
Specifications
| Parameter | Value |
|---|---|
| Chuck Dimensions | 310 mm x 335 mm |
| Chuck Resolution | 0.5 μm |
| Chuck Accuracy | ±2.0 μm |
| Chuck Speed | 50 mm/sec |
| Chuck Z-Axis Travel | 30 mm |
| Chuck Z-Axis Resolution | 0.2 μm |
| Chuck Z-Axis Accuracy | ±2 μm |
| Chuck Z-Axis Repeatability | ±1 μm |
| Chuck Theta Travel | ±5° |
| Chuck Theta Resolution | 0.0001° |
| Chuck Theta Accuracy | <2.0 μm |
| Chuck Theta Repeatability | <1.0 μm |
| Microscope Movement Range | 50 x 50 mm / 300 x 300 mm |
| Microscope Resolution | 1 μm |
| Microscope Repeatability | ≤2 μm |
| Microscope Accuracy | ≤5 μm |
| Microscope Z-Axis Travel | 140 mm |
| Microscope Z-Axis Resolution | 0.05 μm |
| Microscope Z-Axis Repeatability | ≤2 μm |
| Microscope Z-Axis Accuracy | ≤4 μm |
| EMI Shielding | ≥30 dB |
| Light Attenuation | ≥130 dB |
| Spectral Noise Floor | ≤-180 dBVrms/rtHz |
| System AC Noise | ≤5 mVp-p |
| Chuck Temperature Range | -60°C to 300°C |
| Chuck Temperature Stability | ±0.5°C |
| Chuck Temperature Accuracy | ±0.1°C |
| Chuck Temperature Display Resolution | 0.01°C |
| Heating Rate | <12 min (-60°C to 25°C) |
| Cooling Rate | <15 min (25°C to -10°C) |
| Max Voltage | 10 kV |
| Max Current | 600 A |
| Residual Capacitance | ≤2.5 pF |
| System Dimensions | 1400 x 1300 x 1700 mm |
| System Weight | 960 kg |
| Controller CPU | Intel Core i7-7700, 3.6 GHz |
| Controller RAM | DDR4 2400 MHz 16 GB |
| Controller Storage | SSD 500 GB |
| Controller OS | Windows 10 Professional |
| Controller Power | 460 W |
| Controller LAN | TCP/IP ports |
| Controller USB Ports | 3 internal, 1 external |
| Controller GPIB Interface | Optional |
| Power Requirements | 100-240 VAC, 50/60 Hz |
| Vacuum Requirements | -0.9 bar |
| Compressed Air Requirements | 6.0 bar |
Applications
1. High-power device testing 2. Wafer-level reliability testing 3. Semiconductor research and development
Key Features
1. Advanced anti-arcing technologies 2. High voltage and high current probes 3. Shielded environment for accurate measurements 4. Ergonomic design for easy wafer loading 5. Integrated control systems for precise operation
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>
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