TS3000-HP

TS3000-HP

Supplier
Ybsemi-Solution
Part Number
TS3000-HP
Category
Probe Station
Origin
China

The TS3000-HP is a 300 mm automated probe system designed for high-power measurements up to 10 kV and 600 A. It features advanced anti-arcing technologies, ergonomic design, and precise control systems for reliable testing.

Specification Snapshot
Chuck Dimensions
310 mm x 335 mm
Max Voltage
10 kV
Max Current
600 A
System Dimensions
1400 x 1300 x 1700 mm
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Overview

The TS3000-HP is a 300 mm automated probe system designed for high-power measurements up to 10 kV and 600 A. It features advanced anti-arcing technologies, ergonomic design, and precise control systems for reliable testing.

Specifications

ParameterValue
Chuck Dimensions310 mm x 335 mm
Chuck Resolution0.5 μm
Chuck Accuracy±2.0 μm
Chuck Speed50 mm/sec
Chuck Z-Axis Travel30 mm
Chuck Z-Axis Resolution0.2 μm
Chuck Z-Axis Accuracy±2 μm
Chuck Z-Axis Repeatability±1 μm
Chuck Theta Travel±5°
Chuck Theta Resolution0.0001°
Chuck Theta Accuracy<2.0 μm
Chuck Theta Repeatability<1.0 μm
Microscope Movement Range50 x 50 mm / 300 x 300 mm
Microscope Resolution1 μm
Microscope Repeatability≤2 μm
Microscope Accuracy≤5 μm
Microscope Z-Axis Travel140 mm
Microscope Z-Axis Resolution0.05 μm
Microscope Z-Axis Repeatability≤2 μm
Microscope Z-Axis Accuracy≤4 μm
EMI Shielding≥30 dB
Light Attenuation≥130 dB
Spectral Noise Floor≤-180 dBVrms/rtHz
System AC Noise≤5 mVp-p
Chuck Temperature Range-60°C to 300°C
Chuck Temperature Stability±0.5°C
Chuck Temperature Accuracy±0.1°C
Chuck Temperature Display Resolution0.01°C
Heating Rate<12 min (-60°C to 25°C)
Cooling Rate<15 min (25°C to -10°C)
Max Voltage10 kV
Max Current600 A
Residual Capacitance≤2.5 pF
System Dimensions1400 x 1300 x 1700 mm
System Weight960 kg
Controller CPUIntel Core i7-7700, 3.6 GHz
Controller RAMDDR4 2400 MHz 16 GB
Controller StorageSSD 500 GB
Controller OSWindows 10 Professional
Controller Power460 W
Controller LANTCP/IP ports
Controller USB Ports3 internal, 1 external
Controller GPIB InterfaceOptional
Power Requirements100-240 VAC, 50/60 Hz
Vacuum Requirements-0.9 bar
Compressed Air Requirements6.0 bar

Applications

1. High-power device testing 2. Wafer-level reliability testing 3. Semiconductor research and development

Key Features

1. Advanced anti-arcing technologies 2. High voltage and high current probes 3. Shielded environment for accurate measurements 4. Ergonomic design for easy wafer loading 5. Integrated control systems for precise operation

Datasheet

Product Datasheet
PDF
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Supplier Information

Yb
Ybsemi-Solution
View Supplier →
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> &nbsp; &nbsp; &nbsp; At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> &nbsp; &nbsp; &nbsp; The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>

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