PLD Series excimer laser PLD30
Excimer lasers are high-power deep-ultraviolet (DUV) sources. This series uses a magnetically assisted excitation circuit to extend thyratron life, with pulse energies up to 700mJ. A built-in energy-feedback system provides good energy stability. Applications include PLD, precision processing, material-surface treatment, and laser annealing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Medium gas | ArF / KrF |
| Wavelength [ArF] | 193nm |
| Wavelength [KrF] | 248nm |
| Max Single-pulse energy [ArF] | 200mJ |
| Max Single-pulse energy [KrF] | 500mJ |
| Average Power [ArF] | 5W |
| Average Power [KrF] | 14W |
| Max Repetition Rate [ArF / KrF] | 30Hz |
| Spot size [ArF / KrF / V*H] | 24*8mm(V*H) |
| Energy Stability [KrF / @248nm / sigma；@ 248nm)(sigma %)] | 1(@ 248nm)(sigma %) |
Datasheet
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