FBG Series excimer laser
Excimer lasers are high-power deep-ultraviolet (DUV) sources. This series uses all-solid-state pulsed excitation, eliminating the need to replace thyratrons. Advantages include short wavelength, high repetition rate and photon energy, good energy stability, short pulse width, and high peak power. Applications include FBG inscription, precision processing and marking, and spectroscopy.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Medium gas | ArF / KrF / XeC1 |
| Wavelength [ArF] | 193nm |
| Wavelength [KrF] | 248nm |
| Wavelength [XeC1] | 308nm |
| Max Single-pulse energy [ArF] | 7mJ |
| Max Single-pulse energy [KrF] | 12mJ |
| Max Single-pulse energy [XeC1] | 8mJ |
| Average Power [ArF] | 2W |
| Average Power [KrF] | 2W |
| Average Power [XeC1] | 1.4W |
| Max Repetition Rate [ArF / KrF / XeC1] | 200Hz |
| Pulse Width [ArF / KrF / XeC1 / FWHM] | ~15(FWHM,ns) |
| Energy Stability [ArF / KrF / XeC1 / sigma] | 2(sigma.%) |
| Spot size [ArF / KrF / XeC1 / V*H] | 6x3mm(V*H) |
| Divergence angle [ArF / KrF / XeC1 / V*H] | ~2*1mrad(V*H) |
| Product dimensions [ArF / KrF / XeC1 / L*W*H] | 600*350*600mm(L*W*H) |
| Weight [ArF / KrF / XeC1] | 50kg |
| Power supply requirements [ArF / KrF / XeC1] | 220V,50Hz,3A |
| Cooling method [ArF / KrF / XeC1] | Air cooling |
| Interaction method - control system [ArF / KrF / XeC1] | RS232( LCD screen /PC) |
| Interaction method - external trigger [ArF / KrF / XeC1] | Optical signal |
Datasheet
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Supplier Information
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