Micro- and nano-engraving
The system comprises nanosecond and picosecond lasers, a laser-engraving controller, laser coupling and focusing optics, beam-motion control and a three-dimensional sample-positioning module. Multiple coupled pulsed lasers precisely process two-dimensional materials and artificial metasurfaces made of different materials. It is particularly suitable for heterostructures, multilayer structures and more complex systems, providing a tool for constructing two-dimensional artificial metasurfaces and functional micro/nano optical structures. K-Star UV Laser Engraving 2.0.
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Overview
The system comprises nanosecond and picosecond lasers, a laser-engraving controller, laser coupling and focusing optics, beam-motion control and a three-dimensional sample-positioning module. Multiple coupled pulsed lasers precisely process two-dimensional materials and artificial metasurfaces made of different materials. It is particularly suitable for heterostructures, multilayer structures and more complex systems, providing a tool for constructing two-dimensional artificial metasurfaces and functional micro/nano optical structures. K-Star UV Laser Engraving 2.0.
Specifications
| Parameter | Value |
|---|---|
| ns Laser - Power | ≥5W |
| ns Laser - Pulse width | <15ns |
| ns Laser - Pulse Energy | >150μJ |
| ns Laser - Beam quality M² | M²<1.2 |
| ns Laser - Divergence angle | <1.5mrad |
| Nanosecond laser - Pointing stability | <20μrad/°C |
| Nanosecond laser - Power stability [RMS] | <1%RMS |
| ps Laser - Power | ≥20W |
| ps Laser - Pulse width | <10ps |
| ps Laser - Pulse Energy | >20μJ |
| ps Laser - Beam quality M² | M²<1.2 |
| ps Laser - Divergence angle | <1mrad |
| Picosecond laser - Pointing stability | <40μrad/°C |
| Picosecond laser - Power stability [RMS] | <1%RMS |
| Beam expansion System | 6x/8x |
| Galvanometer scanner - Clear Aperture Dimension | 14 Clear Aperture Dimension |
| Processing scan range | ≥25cm² |
| Processing scan speed | >500mm/s |
| X-direction fine adjustment range | 50mm |
| Y-direction fine adjustment range | 80mm |
| Z-direction fine adjustment range | 80mm |
| Power supply requirements | AC 220V±5% 25A |
| Software support | Import of dxf, txt, plt, ai, gbr and other common vector-graphics files |
Applications
Patterning of two-dimensional materials
Key Features
Proprietary laser source; nanometer engraving precision; high-definition visual positioning. The positioning system uses mainstream hardware for stability, purpose-developed software for stability, expandability and maintainability, and established commercial vision algorithms. Control module: mainstream general-purpose control board. Software: custom controller. Optical coupling module: SC60100. Field lens: optional f100 / f160.
Datasheet
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Supplier Information
Founded in 2021 by Dr. Bao Qiaoliang, a globally highly cited scientist, Klight Laser has grown into a national high-tech enterprise. The company focuses on the R&D and production of ultrafast ultraviolet and deep ultraviolet lasers (wavelengths: 355nm/266nm/213nm/193nm), providing deep ultraviolet light sources for semiconductor wafer defect detection (particle detection, bright/dark field detection) or mask inspection equipment. Klight's high-repetition-rate picosecond deep ultraviolet lasers fully match the technical specifications of international counterparts, independently developed with multiple core patented technologies and supplemented by intelligent control systems, offering customized light source matching services for domestic wafer inspection equipment integrators. Additionally, the company provides customized flexible micro-machining solutions in the form of laser modules, and has expanded into multiple application fields such as new energy, pan-semiconductor, and medical aesthetics.
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