Micro- and nano-engraving

Micro- and nano-engraving

Supplier
Klightlaser
Category
Laser Modules & Systems
Origin
China

The system comprises nanosecond and picosecond lasers, a laser-engraving controller, laser coupling and focusing optics, beam-motion control and a three-dimensional sample-positioning module. Multiple coupled pulsed lasers precisely process two-dimensional materials and artificial metasurfaces made of different materials. It is particularly suitable for heterostructures, multilayer structures and more complex systems, providing a tool for constructing two-dimensional artificial metasurfaces and functional micro/nano optical structures. K-Star UV Laser Engraving 2.0.

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Overview

The system comprises nanosecond and picosecond lasers, a laser-engraving controller, laser coupling and focusing optics, beam-motion control and a three-dimensional sample-positioning module. Multiple coupled pulsed lasers precisely process two-dimensional materials and artificial metasurfaces made of different materials. It is particularly suitable for heterostructures, multilayer structures and more complex systems, providing a tool for constructing two-dimensional artificial metasurfaces and functional micro/nano optical structures. K-Star UV Laser Engraving 2.0.

Specifications

ParameterValue
ns Laser - Power≥5W
ns Laser - Pulse width<15ns
ns Laser - Pulse Energy>150μJ
ns Laser - Beam quality M²M²<1.2
ns Laser - Divergence angle<1.5mrad
Nanosecond laser - Pointing stability<20μrad/°C
Nanosecond laser - Power stability [RMS]<1%RMS
ps Laser - Power≥20W
ps Laser - Pulse width<10ps
ps Laser - Pulse Energy>20μJ
ps Laser - Beam quality M²M²<1.2
ps Laser - Divergence angle<1mrad
Picosecond laser - Pointing stability<40μrad/°C
Picosecond laser - Power stability [RMS]<1%RMS
Beam expansion System6x/8x
Galvanometer scanner - Clear Aperture Dimension14 Clear Aperture Dimension
Processing scan range≥25cm²
Processing scan speed>500mm/s
X-direction fine adjustment range50mm
Y-direction fine adjustment range80mm
Z-direction fine adjustment range80mm
Power supply requirementsAC 220V±5% 25A
Software supportImport of dxf, txt, plt, ai, gbr and other common vector-graphics files

Applications

Patterning of two-dimensional materials

Key Features

Proprietary laser source; nanometer engraving precision; high-definition visual positioning. The positioning system uses mainstream hardware for stability, purpose-developed software for stability, expandability and maintainability, and established commercial vision algorithms. Control module: mainstream general-purpose control board. Software: custom controller. Optical coupling module: SC60100. Field lens: optional f100 / f160.

Datasheet

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Supplier Information

Kl
Klightlaser
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Founded in 2021 by Dr. Bao Qiaoliang, a globally highly cited scientist, Klight Laser has grown into a national high-tech enterprise. The company focuses on the R&D and production of ultrafast ultraviolet and deep ultraviolet lasers (wavelengths: 355nm/266nm/213nm/193nm), providing deep ultraviolet light sources for semiconductor wafer defect detection (particle detection, bright/dark field detection) or mask inspection equipment. Klight's high-repetition-rate picosecond deep ultraviolet lasers fully match the technical specifications of international counterparts, independently developed with multiple core patented technologies and supplemented by intelligent control systems, offering customized light source matching services for domestic wafer inspection equipment integrators. Additionally, the company provides customized flexible micro-machining solutions in the form of laser modules, and has expanded into multiple application fields such as new energy, pan-semiconductor, and medical aesthetics.

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Micro- and nano-engraving
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