Single Wafer Spin Cleaning Machine (Spin Rinse Dryer)

Single Wafer Spin Cleaning Machine (Spin Rinse Dryer)

Supplier
Zzqsjm
Part Number
Single Wafer Spin Cleaning Machine (Spin Rinse Dryer)
Category
Semiconductor Packaging Equipment
Origin
China

This is a floor-standing, cleanroom-compatible single-wafer spin processing system designed for programmable spin cleaning, rinsing and nitrogen drying of semiconductor and optoelectronic wafers. The machine integrates an enclosed process chamber with a transparent safety cover and interlock, a high-precision spin chuck, PLC control with a color HMI touchscreen, multiple panel-mounted float flowmeters for DI water/process gas monitoring, an emergency stop (EMO) button and a three-color tower light for real-time status indication. The lower cabinet houses the electrical and fluid control units, and the whole system is mounted on heavy-duty casters with leveling feet for easy relocation and installation in fabs, pilot lines and laboratories.

Specification Snapshot
Power Consumption
≤3kW
Dimensions (W×D×H)
≈800×900×1600mm
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Overview

This is a floor-standing, cleanroom-compatible single-wafer spin processing system designed for programmable spin cleaning, rinsing and nitrogen drying of semiconductor and optoelectronic wafers. The machine integrates an enclosed process chamber with a transparent safety cover and interlock, a high-precision spin chuck, PLC control with a color HMI touchscreen, multiple panel-mounted float flowmeters for DI water/process gas monitoring, an emergency stop (EMO) button and a three-color tower light for real-time status indication. The lower cabinet houses the electrical and fluid control units, and the whole system is mounted on heavy-duty casters with leveling feet for easy relocation and installation in fabs, pilot lines and laboratories.

Specifications

ParameterValue
Compatible Wafer Size2-8inch
Spindle Speed Range100-6000rpm
Speed Accuracy±1rpm
Acceleration100-10000rpm/s
Process Recipe Capacity≥50
Control ModePLC+HMI touch screen
DisplayColor HMI touch screen
Process LiquidDI water/chemical solution
Process GasN2/CDA
Flowmeter Channels4
Drying MethodN2 spin drying
Safety ProtectionChamber door interlock
Safety ProtectionEMO button
Status Indication3-color tower light with buzzer
Power SupplyAC220V,50/60Hz
Power Consumption≤3kW
Dimensions (W×D×H)≈800×900×1600mm
Equipment Weight≈400kg
MobilityHeavy-duty casters with leveling feet

Applications

1. Silicon, compound semiconductor (GaAs, InP, SiC, GaN) wafer cleaning and drying processes 2. LED chip and epitaxial wafer surface cleaning in optoelectronics manufacturing 3. Laser diode, photodetector and photonic integrated device fabrication 4. MEMS and sensor device wet process and spin drying 5. Optical substrate and optical component precision cleaning 6. R&D laboratories, universities and semiconductor pilot production lines

Key Features

1. Fully enclosed process chamber with transparent safety cover and door interlock to protect operators from splash and mist 2. PLC control system with color HMI touch screen, supporting multi-step programmable cleaning, rinsing and drying recipes 3. High-precision spin chuck with stable speed control for uniform cleaning and fast N2 drying 4. Multiple panel-mounted float flowmeters for real-time monitoring of DI water, chemical and gas flows 5. Three-color tower light and buzzer for clear equipment status indication 6. Emergency stop (EMO) button for immediate shutdown in abnormal conditions 7. Compact floor-standing design with separated upper process area and lower electrical/fluid cabinet 8. Heavy-duty casters with leveling feet for easy movement and stable installation in cleanrooms

Datasheet

Product Datasheet
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Supplier Information

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Zzqsjm
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<p>Since its establishment in 2014, Qisheng Precision has been focusing on the semiconductor and precision manufacturing industry, specializing in R&D and manufacturing of dicing equipment, superhard tools, and precision grinding products. It is one of the few high-tech enterprises in China that truly achieves dual-track independent R&D of "equipment + tools". Core strengths: integrated R&D and manufacturing, three business divisions, full-chain capability; professional R&D team mastering core technologies. Core products: precision dicing machines, full series of dicing blades (electroformed, resin, metal), precision grinding products (thinning wheels, ceramic chucks, etc.). Applications: integrated circuits, LED chips, optical components, new energy batteries, electronic ceramics, magnetic materials. Served thousands of enterprises across 30 provinces. Vision: Perseverance, proactiveness, harmonious work, self-transcendence; striving for innovation and precision.</p>

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Single Wafer Spin Cleaning Machine (Spin Rinse Dryer)
Zzqsjm · Semiconductor Packaging Equipment
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