F1 Silicon Probe Platform System
The world's first fully digital silicon probe platform system, designed with proprietary intellectual property rights, offering high precision and efficiency.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Travel X-axis | 301mm |
| Travel Y-axis | 301mm |
| Travel Z-axis | 2-10mm |
| Travel Theta axis | 10° |
| Positioning Accuracy X-axis | ≤0.05μm |
| Positioning Accuracy Y-axis | ≤0.05μm |
| Positioning Accuracy Z-axis | ≤1μm |
| Positioning Accuracy Theta axis | ±0.003° |
| Speed X-axis | ≥50mm/s |
| Speed Y-axis | ≥50mm/s |
| Speed Z-axis | ≥20mm/s |
| Maximum Speed X-axis | 150mm/s |
| Maximum Speed Y-axis | 150mm/s |
| Maximum Speed Z-axis | 35mm/s |
| Wafer Horizontal Positioning Capability | 100μm |
| Mapping Stability Average Time Minimum | <500ms |
| Mapping Stability Average Time Typical | <1s |
| Mapping Stability Average Time Maximum | <3s |
| XY Position Stability Minimum | 0.02μm |
| XY Position Stability Typical | 0.038μm |
| XY Position Stability Maximum | 1.5μm |
| Z Position Stability Minimum | 0.65μm |
| Z Position Stability Typical | 3.5μm |
| Z Position Stability Maximum | 15μm |
| Optical Shielding | ≥150dB |
| EM Shielding | ≥20dB 0.5-20GHz (typical) |
| Spectral Noise Level | ≤-150dBVrms/rtHz (≤1MHz) |
| System AC Noise | ≤15mVp-p (≤1GHz) |
| Vertical Anti-Vibration Frequency | 2.5-2.7Hz |
| Horizontal Anti-Vibration Frequency | 2.0-4.5Hz |
| Vertical Damping | 6%-20% |
| Horizontal Damping | 5%-6% |
| Air Supply Pressure | 0.3-0.5MPa |
| Maximum Load | 1600kg |
| Damping Efficiency | 5%-6% |
| Response Time to External Impact | <1s |
| Anti-Vibration Level | VC-C |
| Microscope Travel X-axis | 50mm |
| Microscope Travel Y-axis | 50mm |
| Microscope Travel Z-axis | 90mm |
| Microscope Maximum Positioning Accuracy X-axis | ±2μm |
| Microscope Maximum Positioning Accuracy Y-axis | ±2μm |
| Microscope Maximum Positioning Accuracy Z-axis | ±2μm |
| Microscope Speed X-axis | 60mm/s |
| Microscope Speed Y-axis | 60mm/s |
| Microscope Speed Z-axis | 120mm/s |
| Microscope Magnification Typical Value | 225x |
| Microscope Typical Optical Resolution | 3.0μm |
| Microscope High Resolution Optical Resolution | 1.5μm |
| Chuck Temperature Range 8-inch | -60°C to 300°C |
| Chuck Temperature Range 12-inch | -60°C to 300°C |
| Chuck Temperature Stability 8-inch | ±1°C |
| Chuck Temperature Stability 12-inch | ±1°C |
| Chuck Temperature Resolution 8-inch | 0.1°C |
| Chuck Temperature Resolution 12-inch | 0.1°C |
| Chuck High Temperature Current 8-inch | ≤132A |
| Chuck High Temperature Current 12-inch | ≤231A |
| Chuck High Temperature Voltage 8-inch | ≤30A |
| Chuck High Temperature Voltage 12-inch | ≤42A |
| Chuck Maximum Heating Power 8-inch | 5.5kW |
| Chuck Maximum Heating Power 12-inch | 12.5kW |
| Chuck Maximum Cooling Speed | 5m/s |
| Chuck Maximum Air Supply Pressure | 4bar |
| Chuck Maximum Voltage | 10000V |
| Chuck Maximum Current | 800A |
| Control Software Function AutoZ | Included |
| Control Software Function High AutoZ | Optional |
| Control Software Function Dual Interface | Microscope and Chuck Movement |
| High Precision Dual-Side Fiber Alignment System Active Axes | X,Y,Z,6X,6Y,6Z |
| High Precision Dual-Side Fiber Alignment System Travel Range | ±6.5,±16,±8.5mm |
| High Precision Dual-Side Fiber Alignment System Positioning Accuracy | 0.1μm |
| High Precision Dual-Side Fiber Alignment System Maximum Speed | 10mm/s |
| High Precision Dual-Side Fiber Alignment System Alignment Time | <5s |
| Six-Axis Controller Input Voltage Range | -5V to 5V |
| Six-Axis Controller ADC Resolution | 16bit |
| Six-Axis Controller Bandwidth | 5kHz |
| Six-Axis Controller Input Impedance | 15kohm |
| Six-Axis Controller Interface | BNC |
| Six-Axis Controller Processor | Intel Atom Dual Core (1.8GHz) |
| Six-Axis Controller User Software | futureC |
| Six-Axis Controller Operating Temperature Range | 5°C to 40°C |
| Six-Axis Controller Weight | 2.8kg |
| Six-Axis Positioner Active Axes | X,Y,Z,6X,6Y,6Z |
| Six-Axis Positioner Travel Range | ±17,±16,±6.5mm |
| Six-Axis Positioner Positioning Accuracy | 0.1μm |
| Six-Axis Positioner Maximum Speed | 10mm/s |
| Six-Axis Positioner Operating Temperature Range | 0°C to 50°C |
| Six-Axis Positioner Weight | 2.2kg |
| Nano Positioner Active Axes | X |
| Nano Positioner Active Axes | Y |
| Nano Positioner Active Axes | Z |
| Nano Positioner Open Loop Travel | 120μm/axis |
| Nano Positioner Closed Loop Travel | 100μm/axis |
| Nano Positioner Minimum Step | 2.5nm |
| Nano Positioner Linearity Error | 2% |
| Nano Positioner Alignment Time | <5s |
| Nano Positioner Operating Temperature Range | -20°C to 80°C |
| Nano Positioner Dimensions | 40x40x40mm |
| Nano Positioner Weight | 0.32kg |
| Nano Positioner Sensor Type | Optical Position Sensor |
| Nano Positioner Drive Type | PICMA® P-885.50 |
| Nano Positioner Capacitance | 1.5μF/axis |
| Nano Positioner Dynamic Operating Current Coefficient | 1.9μA/(Hz×μm) |
| Dimensions and Weight Typical Dimensions | ~1500x1115x1543.5mm |
| Dimensions and Weight Maximum External Dimensions | ~1750x1485x1613.5mm |
| Dimensions and Weight Main Unit Weight | ~850kg |
| Dimensions and Weight High-Low Temperature Controller Weight | ~180kg |
| Dimensions and Weight Robot Arm Weight | ~345kg |
Applications
Key Features
Datasheet
Supplier Information
Related Products
-
futureD Semiconductor Big Data System
Probe Station
Eoulu
Server Room: 不同断电源、温度、湿度适宜，防尘 Operating System: win10; 64位操作系统 Processor: 6核
futureD is a big data processing tool designed to help customers process massive data generated during semiconductor testing. It simplifies calculations, making data processing faster and more efficient.
-
SWIT-009
Probe Station
Eoulu
Number of Input Ports: 12 Number of Output Ports: 18 Maximum Operating Voltage: 3000V
SWIT-009 is a high-performance matrix switch designed for precise and efficient signal routing in various applications. It features advanced technical specifications and robust design, making it suitable for demanding environments.
-
TS150 Manual Probe System
Probe Station
Ybsemi-Solution
Total Travel Range: 180x230mm (7.1x9.1in) Fine Travel Range: 25x25mm fine micrometer control Fine Travel Resolution: <1.0μm (0.04mils)@500μm/rev
The TS150 is a 150 mm manual probe system designed for accurate and reliable DC/CV and RF measurements, offering high precision and flexibility for various applications.
-
MPI TS200-HP
Probe Station
Ybsemi-Solution
Probe Station Dimensions: 900×1050×1930mm Weight: ~500kg Chuck XY Stage Travel Range: 225×260mm
The MPI TS200-HP is a 200 mm manual probe system designed for accurate and reliable high-power measurements up to 10 kV and 600 A. It features advanced EMI/RFI shielding, ergonomic design, and compatibility with various accessories for high voltage and high current applications.
-
TS3500-SE
Probe Station
Ybsemi-Solution
Chuck XY Stage Travel Range: 310mm×530mm Resolution: 0.0001° (0.24μm @ 300mm edge) Accuracy: <2.0μm
The TS3500-SE is a 300 mm automated probe system designed for accurate and reliable IV, CV, pulsed-IV, 1/f, and RF measurements. It features advanced EMI shielding, ultra-low noise IV measurements, and programmable microscope movements for test automation.
Related Articles
Electro-optic deflectors (EODs) are optical devices used to steer or deflect light beams by applying an electric field to a specialized optical crystal. Unlike mechanical beam steering systems that rely on moving mirrors, electro-optic deflectors enable high-speed, non-mechanical beam control with exceptional precision and responsiveness. They are widely used in laser scanning, optical communications, microscopy, laser printing, spectroscopy, and scientific research, where rapid and accurate laser beam positioning is essential.
An infrared transmitter (IR transmitter) is a basic electronic component that sends invisible infrared light signals for short-range wireless control. It is widely used in daily electronics, smart home devices, and industrial equipment due to its low cost, low power consumption, and stable performance.
Shanghai Connet Laser Technology Co., Ltd. focuses on technological innovation, delivering cutting-edge photonic products & solutions for industrial lasers, LiDAR, fiber optic sensing, coherent telecom, cold atom physics and precision spectroscopy research & mass manufacturing.
Wuhan Optical Valley Interlink Technology Co., Ltd. was founded in 2013 by a technical team from Huazhong University of Science and Technology.
Loading...
Name
Phone
Organization
Use Case
Database Platform