F1 Probe Platform System
Eoulu F1 is the world's first fully digital probe platform system, offering high precision and advanced features for semiconductor testing and analysis.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel X-axis | 301mm |
| Travel Y-axis | 301mm |
| Travel Z-axis | ≥10mm |
| Travel Theta axis | 10° |
| Positioning Accuracy X-axis | ≤0.05μm |
| Positioning Accuracy Y-axis | ≤0.05μm |
| Positioning Accuracy Z-axis | ≤1μm |
| Positioning Accuracy Theta axis | ±0.003° |
| Speed X-axis | 60mm/s |
| Speed Y-axis | 60mm/s |
| Speed Z-axis | 120mm/s |
| Maximum Speed X-axis | 150mm/s |
| Maximum Speed Y-axis | 150mm/s |
| Maximum Speed Z-axis | 35mm/s |
| Minimum Planar Optical Measurement Capability | 100μm |
| Mapping Signal Average Time Minimum Value | <500ms |
| Mapping Signal Average Time Typical Value | <1s |
| Mapping Signal Average Time Maximum Value | <3s |
| XY Position Stability Minimum Value | 0.02μm |
| XY Position Stability Typical Value | 0.038μm |
| XY Position Stability Maximum Value | 1.5μm |
| Z Position Stability Minimum Value | 0.65μm |
| Z Position Stability Typical Value | 3.5μm |
| Z Position Stability Maximum Value | 15μm |
| Optical Shielding | ≥150dB |
| EMI Shielding | ≥20dB@0.5~20GHz (typical) |
| Spectral Noise Level | ≤-150dBm/√Hz (≤1MHz) |
| System AC Noise | ≤15mVpp (≤1GHz) |
| Heavy Damping Characteristic Frequency Option 1 | 2.6~5.3Hz |
| Heavy Damping Characteristic Frequency Option 2 | 2.5~2.7Hz |
| Horizontal Direction Shock Absorption Option 1 | N/A |
| Horizontal Direction Shock Absorption Option 2 | 2.0~4.5Hz |
| Self-weight Damping Option 1 | N/A |
| Self-weight Damping Option 2 | 6%~20% |
| Horizontal Damping Option 1 | N/A |
| Horizontal Damping Option 2 | 5%~6% |
| Air Supply Voltage | 0.3~0.5MPa |
| Maximum Load Option 1 | 800kg |
| Maximum Load Option 2 | 1600kg |
| Isolation Efficiency Option 1 | ≥59% |
| Isolation Efficiency Option 2 | ≥59% |
| XY Axis Travel | 50mm |
| Z Axis Travel | 90mm |
| Maximum Travel Positioning Accuracy | ±3μm |
| Magnification Range Large FOV | 225x |
| Magnification Range High Resolution | 500~2000x |
| Typical Optical Resolution Capability Large FOV | 3.0μm |
| Typical Optical Resolution Capability High Resolution | 1.5μm |
| Temperature Range 8-inch Room Temperature | N/A |
| Temperature Range 8-inch High Temperature | -60~300°C |
| Temperature Range 12-inch Room Temperature | N/A |
| Temperature Range 12-inch High Temperature | -60~300°C |
| Minimum Temperature Rapid Reach Range 8-inch Room Temperature | N/A |
| Minimum Temperature Rapid Reach Range 8-inch High Temperature | -60~300°C |
| Minimum Temperature Rapid Reach Range 12-inch Room Temperature | N/A |
| Minimum Temperature Rapid Reach Range 12-inch High Temperature | -60~300°C |
| Temperature Accuracy | ±1°C |
| Temperature Resolution | 0.1°C |
| Normal Temperature Single Pressure Triax Chuck Leakage 8-inch Standard | <132μA |
| Normal Temperature Single Pressure Triax Chuck Leakage 8-inch Low Temperature | <65μA |
| Normal Temperature Single Pressure Triax Chuck Leakage 12-inch Standard | <231μA |
| Normal Temperature Single Pressure Triax Chuck Leakage 12-inch Low Temperature | <65μA |
| Normal Temperature Single Pressure Triax Chuck Single End 8-inch Standard | <30μA |
| Normal Temperature Single Pressure Triax Chuck Single End 8-inch Low Temperature | <16μA |
| Normal Temperature Single Pressure Triax Chuck Single End 12-inch Standard | <42μA |
| Normal Temperature Single Pressure Triax Chuck Single End 12-inch Low Temperature | <16μA |
| Maximum External Pressure | 10000V |
| Maximum External Current | 800A |
| 8-inch Stage Cooling and Heating Time Air Cooling Option 1 | -60°C→25°C:7min,25°C→300°C:33min,300°C→25°C:15min,25°C→-60°C:25min |
| 8-inch Stage Cooling and Heating Time Air Cooling Option 2 | -60°C→25°C:22min,25°C→300°C:25min,300°C→25°C:25min,25°C→-60°C:30min |
| 8-inch Stage Cooling and Heating Time Water Cooling Option | -60°C→25°C:23min,25°C→300°C:28min,300°C→25°C:25min,25°C→-60°C:37min |
| 12-inch Stage Cooling and Heating Time Air Cooling Option 1 | -60°C→25°C:7min,25°C→300°C:33min,300°C→25°C:15min,25°C→-60°C:25min |
| 12-inch Stage Cooling and Heating Time Air Cooling Option 2 | -60°C→25°C:22min,25°C→300°C:25min,300°C→25°C:25min,25°C→-60°C:30min |
| 12-inch Stage Cooling and Heating Time Water Cooling Option | -60°C→25°C:23min,25°C→300°C:28min,300°C→25°C:25min,25°C→-60°C:37min |
| Noise Air Cooling Option 1 | ≤65dB |
| Noise Air Cooling Option 2 | ≤70dB |
| Noise Water Cooling Option | ≤72dB |
| Weight Air Cooling Option 1 | ≤180kg |
| Weight Air Cooling Option 2 | ≤295kg |
| Weight Water Cooling Option | ≤180kg |
| External Dimensions (W×D×H) Non-arm Machine | ~1500×1115×1543.5mm |
| External Dimensions (W×D×H) Arm Machine | ~2063×1620×1954mm |
| Maximum External Dimensions (W×D×H) Non-arm Machine | ~1750×1465×1613.5mm |
| Maximum External Dimensions (W×D×H) Arm Machine | ~2373×1620×2004mm |
| Weight Non-arm Machine | 540~850kg |
| Weight Arm Machine | 280~345kg |
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