MPI TS3000
The MPI TS3000 is a 300 mm automated probe system designed for product engineering and RF, mmW, load-pull measurements. It features advanced IceFreeEnvironment™ technology for precise testing at negative temperatures, integrated controls, and ergonomic design.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chuck XY Stage Travel Range | 310mm×310mm |
| Chuck XY Stage Resolution | 0.5μm |
| Chuck XY Stage Accuracy | ±2.0μm |
| Chuck XY Stage Repeatability | ±1.0μm |
| Chuck XY Stage Speed | 10mm/sec to 50mm/sec |
| Chuck Z Stage Travel Range | 30mm |
| Chuck Z Stage Resolution | 0.2μm |
| Chuck Z Stage Accuracy | ±2.0μm |
| Chuck Z Stage Repeatability | ±1.0μm |
| Chuck Z Stage Speed | 10mm/sec to 50mm/sec |
| Chuck Theta Stage Travel Range | ±5° |
| Chuck Theta Stage Resolution | 0.0001° |
| Chuck Theta Stage Accuracy | <2.0μm |
| Chuck Theta Stage Repeatability | <1.0μm |
| Microscope Movement XYZ Stage Travel Range | 50mm×50mm×140mm |
| Microscope Movement Resolution X-Y Axis | 1μm |
| Microscope Movement Accuracy X-Y Axis | ≤5μm |
| Microscope Movement Resolution Z Axis | 0.05μm |
| Microscope Movement Accuracy Z Axis | ≤4μm |
| Probe Platen Material | Nickel plated steel |
| Probe Platen Chuck Top to Platen Top | Min. 28mm |
| Probe Platen Cooling | Fully integrated CDA cooling |
| Probe Platen Configuration | Probe card holder 4.5×11" and/or MicroPositioners |
| Probe Platen Max. No. of MicroPositioners | 10x DC MicroPositioners or 4x DC + 4x HF MicroPositioner Setup |
| Probe Platen RF MicroPositioner Mounting | Magnetic with guided rail |
| Probe Platen DC MicroPositioner Mounting | Magnetic |
| Thermal Chuck Connectivity | Kelvin Triax (f) |
| Thermal Chuck Temperature Control Method | Cooling air/Resistance heater |
| Thermal Chuck Coolant | Air (user supplied) |
| Thermal Chuck Temperature Stability | ±0.5°C |
| Thermal Chuck Temperature Accuracy | 0.1°C |
| Thermal Chuck Surface Flatness | <±12μm |
| Thermal Chuck Max Voltage Between Force-to-GND | 600V DC |
| Thermal Chuck Max Voltage Between Force-to-Guard | 100V DC |
| Thermal Chuck Heating Rates | 35 to 200°C <15min, 35 to 300°C <25min |
| Thermal Chuck Cooling Rates | 300 to 35°C <35min, 300 to 25°C <28min |
| System Dimensions | 1400mm×1115mm×1550mm |
| System Weight | 850kg |
| System Controller CPU | Intel Core i7-7700, 3.6GHz, 8M Cache |
| System Controller RAM | DDR4 2400MHz 16GB |
| System Controller Storage | SSD 500GB |
| System Controller Operating System | Windows 10 Professional |
| System Controller Power | 460W |
| System Controller LAN | One internal and one external TCP/IP ports |
| System Controller USB Ports | Internal (on PC) x3, external x1 |
| System Controller GPIB Interface | Optional |
| Facility Requirements Power | 100-240V AC nominal, 50/60Hz |
| Facility Requirements Vacuum | -0.9bar |
| Facility Requirements Compressed Air | 6.0bar |
Applications
Key Features
Datasheet
Supplier Information
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