MPI TS3000-SE
The MPI TS3000-SE is a 300 mm automated probe system designed for ultra-low noise IV, CV, pulsed-IV, 1/f, and RF measurements. It features advanced EMI/RFI shielding, precise thermal chuck integration, and ergonomic design for efficient and accurate testing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range (XY) | 310mm×310mm |
| Resolution (XY) | 0.5μm |
| Accuracy (XY) | ±2.0μm |
| Repeatability (XY) | ±1.0μm |
| Travel Range (Z) | 30mm |
| Resolution (Z) | 0.2μm |
| Accuracy (Z) | ±2.0μm |
| Repeatability (Z) | ±1.0μm |
| Travel Range (Theta) | ±5° |
| Resolution (Theta) | 0.0001° |
| Accuracy (Theta) | <2.0μm |
| Repeatability (Theta) | <1.0μm |
| Microscope Travel Range (XYZ) | 50mm×50mm×140mm |
| Microscope Resolution (XY) | 1μm |
| Microscope Accuracy (XY) | ≤2μm |
| Microscope Repeatability (XY) | ≤5μm |
| Microscope Resolution (Z) | 0.05μm |
| Microscope Accuracy (Z) | ≤4μm |
| Microscope Repeatability (Z) | ≤4μm |
| Probe Platen Material | Nickel plated steel |
| Probe Platen Height | 50±0.5mm |
| Platen Cooling | Fully integrated CDA cooling |
| Max. No. of MicroPositioners | 8x DC MicroPositioners or 4x DC + 4x RF MicroPositioners |
| RF MicroPositioner Mounting | Magnetic with guided rail |
| DC MicroPositioner Mounting | Magnetic |
| EMI Shielding | >30dB (typical) @1kHz to 1MHz |
| Light Attenuation | ≥130dB |
| Spectral Noise Floor | ≤-180dBVrms/rtHz (≤1MHz) |
| System AC Noise | ≤5mVp-p (≤1GHz) |
| Temperature range | -60°C to 300°C |
| Temperature Stability | ±0.5°C |
| Temperature Accuracy | ±0.1°C |
| Temperature Uniformity | <±0.5°C at 200°C, <±1°C at 300°C |
| Surface Flatness | <±12μm |
| Max Voltage | 600V DC |
| Capacitance (Force-to-Guard) | <1600pF |
| Capacitance (Guard-to-Shield) | <2000pF |
| Heating Rates | 35 to 200°C <15min, 35 to 300°C <25min |
| Cooling Rates | 300 to 35°C <35min, 200 to 35°C <28min |
Applications
Key Features
Datasheet
Supplier Information
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