TS300-SE Manual Probe System
The TS300-SE is a 300 mm manual probe system designed for accurate and reliable DC/CV, RF, and mmW measurements across a wide temperature range.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Probe Station Dimensions (W×D×H) | 1190×1180×1590mm |
| Probe Station Weight | ~465kg |
| XY Stage Travel Range | 325×325mm |
| XY Stage Fine Travel Resolution | <1.0μm@500μm/rev |
| XY Stage Planarity | <10μm |
| XY Stage Theta Travel | 360° |
| XY Stage Theta Resolution | 7.5×10^-3 gradient |
| XY Stage Theta Fine Travel | ±5.0° |
| Z Stage Travel Range | 5mm |
| Z Stage Fine Travel Resolution | <1.0μm@500μm/rev |
| Z Stage Load Stroke | 20mm |
| Microscope Stage Travel Range | 50×50mm |
| Microscope Stage Fine Travel Resolution | <5μm |
| Microscope Stage Scope Lift | 140mm |
| Probe Platen Material | Nickel plated steel |
| Probe Platen Dimensions | See drawing |
| Probe Platen to ShieldGuard Height | Min. 5mm |
| Max. Number of MicroPositioners | 8x DC MicroPositioners or 4x DC + 4x RF MicroPositioners |
| Probe Platen Lift Control | 3 positions - contact (0), separation (300μm), loading (3mm) |
| Probe Hover Control | Additional hover height (50, 100, or 150μm) |
| Contact Repeatability | <1μm |
| RF MicroPositioner Mounting | Magnetic with guided rail |
| MicroPositioner Mounting | Magnetic |
| 300°C Thermal Isolation | Depending on chuck configuration |
| EMI Shielding | >30dB@1kHz to 1MHz |
| Light Attenuation | ≥130dB |
| Spectral Noise Floor | <-180dBVrms/rtHz@≤1MHz |
| System AC Noise | ≤5mVp-p@≤1GHz |
| Temperature range | -60°C to 300°C |
| Temperature Stability | ±0.5°C |
| Temperature Accuracy | ±0.1°C |
| Heating Rates | 35°C to 200°C<15min, 35°C to 300°C<25min |
| Cooling Rates | 300°C to 35°C<35min, 200°C to 25°C<28min |
| Surface Flatness | <12μm |
| Base Parallelism | <12μm |
| Max Voltage | 600V DC |
| Capacitance | Force-to-Guard<1600pF, Guard-to-Shield<2000pF |
Applications
Key Features
Datasheet
Supplier Information
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