MPI TS2000-SE
The MPI TS2000-SE is a 200 mm automated probe system designed for accurate and reliable DC/CV, RF, and mmW measurements. It features advanced EMI/RFI shielding, ergonomic design, and integrated software for efficient testing.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Chuck XY Stage Travel Range | 210x300mm (8.27x11.81in) |
| Resolution | 0.0004° |
| Accuracy | <2.0μm |
| Repeatability | <1.0μm |
| XY Stage Drive | High resolution stepper motor with linear encoder feedback system |
| Speed | 10μm/sec to 4mm/sec |
| Chuck Z Stage Travel Range | 50mm (2in) |
| Z Stage Drive | High resolution stepper motor with integrated pin drive system |
| Chuck Theta Stage Travel Range | ±6.0° |
| Theta Stage Drive | High resolution stepper motor with linear encoder feedback system |
| Video Camera Sensor Type | 1/1.8'' mono CCD |
| Video Camera Sensor Size | 7.07mm x 5.3mm |
| Video Camera Pixels | 3MP |
| Video Camera Resolution | 2048x1536 pixels |
| Wafer Alignment Camera Sensor Type | 1/1.8'' color CCD |
| Wafer Alignment Camera Sensor Size | 7.07mm x 5.3mm |
| Wafer Alignment Camera Pixels | 3MP |
| Wafer Alignment Camera Resolution | 2048x1536 pixels |
| Microscope XYZ Travel Range | 50x50mm |
| Microscope Resolution | 1μm (0.04mils) |
| Microscope Repeatability | <2μm (0.08mils) |
| Microscope Accuracy | <5μm (0.2mils) |
| Microscope Z Travel Range | 140mm |
| Microscope Z Resolution | 0.05μm (0.002mils) |
| Microscope Z Repeatability | <2μm (0.08mils) |
| Microscope Z Accuracy | <4μm (0.016mils) |
| Probe Platen Material | Nickel plated steel |
| Probe Platen Height | min. 5mm |
| Probe Platen Feature | Integrated Air-Cool platen control for thermal stability of MicroPositioners |
| Max. No of MicroPositioners | 8x DC or 4x DC + 2x RF or 2x DC + 4x RF or 4x DC + 4x RF Setup |
| EMI Shielding | >30dB (typical) @ 1kHz to 1MHz |
| Light Attenuation | ≥130dB |
| Spectral Noise Floor | ≤-180dBVrms/rtHz (≤1MHz) |
| System AC Noise | ≤5mVp-p (≤1GHz) |
| Temperature range | -60°C to 300°C |
| Temperature Stability | ±0.08°C |
| Temperature Accuracy | ±0.1°C |
| Temperature Uniformity | <±0.5°C at 200°C |
| Surface Flatness and Base Parallelism | <±10μm at 200°C |
| Heating Rates | 200 to 200°C <20min |
| Cooling Rates | 200 to 20°C <20min |
| Electrical Isolation | >10TΩ at 25°C |
| Leakage Current | <15fA at 25°C |
| Capacitance | <900pF |
| Maximum Voltage | 500V DC |
| System Dimensions | 1180x970x1450mm (46.5x38.2x57.1in) |
| Weight | 650kg |
| System Controller CPU | Intel Core i7-7700, 3.6GHz, 8M Cache, 14nm, 65W TDP, LGA1151(4C/8T) |
| System Controller RAM | DDR4 2400MHz 16GB x1 |
| System Controller Operating System | Windows 10 Professional (English) |
| System Controller Power | 460W |
| System Controller Storage | SSD 500GB |
| System Controller LAN | One internal and one external TCP/IP ports |
| System Controller USB Ports | Internal (on PC) x3, external x1 |
| System Controller GPIB Interface | Optional |
| Supported Software Platforms | WaferPro / IC-CAP & EasyEXPERT from Keysight, BSIMPro & NoisePro from ProPlus, ACS from Keithley |
| Power | 100-240V AC nominal; 50/60Hz |
| Vacuum | -0.9bar |
| Compressed Air | 6.0bar |
Applications
Key Features
Datasheet
Supplier Information
Related Products
-
futureD Semiconductor Big Data System
Probe Station
Eoulu
Server Room: 不同断电源、温度、湿度适宜，防尘 Operating System: win10; 64位操作系统 Processor: 6核
futureD is a big data processing tool designed to help customers process massive data generated during semiconductor testing. It simplifies calculations, making data processing faster and more efficient.
-
SWIT-009
Probe Station
Eoulu
Number of Input Ports: 12 Number of Output Ports: 18 Maximum Operating Voltage: 3000V
SWIT-009 is a high-performance matrix switch designed for precise and efficient signal routing in various applications. It features advanced technical specifications and robust design, making it suitable for demanding environments.
-
TS150 Manual Probe System
Probe Station
Ybsemi-Solution
Total Travel Range: 180x230mm (7.1x9.1in) Fine Travel Range: 25x25mm fine micrometer control Fine Travel Resolution: <1.0μm (0.04mils)@500μm/rev
The TS150 is a 150 mm manual probe system designed for accurate and reliable DC/CV and RF measurements, offering high precision and flexibility for various applications.
-
MPI TS200-HP
Probe Station
Ybsemi-Solution
Probe Station Dimensions: 900×1050×1930mm Weight: ~500kg Chuck XY Stage Travel Range: 225×260mm
The MPI TS200-HP is a 200 mm manual probe system designed for accurate and reliable high-power measurements up to 10 kV and 600 A. It features advanced EMI/RFI shielding, ergonomic design, and compatibility with various accessories for high voltage and high current applications.
-
TS3500-SE
Probe Station
Ybsemi-Solution
Chuck XY Stage Travel Range: 310mm×530mm Resolution: 0.0001° (0.24μm @ 300mm edge) Accuracy: <2.0μm
The TS3500-SE is a 300 mm automated probe system designed for accurate and reliable IV, CV, pulsed-IV, 1/f, and RF measurements. It features advanced EMI shielding, ultra-low noise IV measurements, and programmable microscope movements for test automation.
Related Articles
Founded in 2004, Wuhan Union Optic Inc. is a National Specialized, Refined, Unique & Innovative "Little Giant" high-tech enterprise located in Wuhan East Lake High-Tech Development Zone.
Semiconductor laser diodes are essential light sources for industrial sensing, LiDAR and laser printing. Many engineers waste time picking mismatched models. We summarize 4 simple selection standards, plus a mature industrial product: HGLD-790TO5.6-ZSP-10mW from HAUCORE.
Electro-optic deflectors (EODs) are optical devices used to steer or deflect light beams by applying an electric field to a specialized optical crystal. Unlike mechanical beam steering systems that rely on moving mirrors, electro-optic deflectors enable high-speed, non-mechanical beam control with exceptional precision and responsiveness. They are widely used in laser scanning, optical communications, microscopy, laser printing, spectroscopy, and scientific research, where rapid and accurate laser beam positioning is essential.
In photonics and laser technology, devices that manipulate optical signals via the electro-optic effect form the backbone of precision optical systems. Electro-optic phase modulators and electro-optic deflectors are two prominent examples of this device category. As a critical hardware solution for high-speed, high-accuracy laser beam direction control, electro-optic deflectors are widely deployed across industrial and research settings. Below is a detailed overview of their core structure, key performance drivers, and primary use cases.
Loading...
Name
Phone
Organization
Use Case
Database Platform