MPI TS2000 Series
The MPI TS2000 Series is a 200 mm automated probe system designed for accurate and reliable DC/CV, RF, and high-power measurements. It features advanced thermal control, integrated dark box, and intuitive software for efficient testing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chuck XY Stage Travel Range | 210mm×340mm |
| Chuck XY Stage Resolution | 0.1μm |
| Chuck XY Stage Accuracy | ±4.0μm |
| Chuck XY Stage Drive | Closed-loop high precision servo motor PID control |
| Chuck XY Stage Speed | 5-Speed XY chuck stage speed movement |
| Chuck XY Stage Max Movement Speed | 100mm/sec |
| Chuck Z Stage Travel Range | 10mm |
| Chuck Z Stage Resolution | 0.2μm |
| Chuck Z Stage Accuracy | ±2.0μm |
| Chuck Z Stage Repeatability | ±3.0μm (in fast mode) |
| Chuck Z Stage Drive | Closed-loop high precision servo motor PID control |
| Chuck Z Stage Speed | 5-Speed Z chuck stage adjustable speed movement |
| Chuck Z Stage Max Movement Speed | 30mm/sec |
| Chuck Theta Stage Travel Range | ±5° |
| Chuck Theta Stage Resolution | 0.0004° |
| Chuck Theta Stage Accuracy | <3.0μm (measured at the edge of the 200mm chuck) |
| Chuck Theta Stage Repeatability | <2.0μm |
| Chuck Theta Stage Drive | High resolution stepper motor with linear encoder feedback system |
| Microscope XYZ Stage Travel Range | 50mm×50mm |
| Microscope XYZ Stage Resolution | 1μm (0.04mils) |
| Microscope XYZ Stage Repeatability | <2μm (0.08mils) |
| Microscope XYZ Stage Accuracy | <5μm (0.2mils) |
| Microscope Z Stage Travel Range | 140mm |
| Microscope Z Stage Resolution | 0.05μm (0.002mils) |
| Microscope Z Stage Repeatability | <2μm (0.08mils) |
| Microscope Z Stage Accuracy | <4μm (0.016mils) |
| Probe Platen Material | Nickel plated steel |
| Probe Platen Minimum Thickness | 28mm |
| Probe Platen Max Number of MicroPositioners | 12x DC MicroPositioners or 4x DC + 4x RF MicroPositioners |
| Electrical Specification Operation Voltage | 500V DC |
| Electrical Specification Isolation | 2GΩ |
| Electrical Specification Leakage Current | <0.8pA |
| Electrical Specification Capacitance | <750pF |
| Electrical Specification Max Voltage | 10kV DC |
| Thermal Chuck Temperature Range | -60°C to 300°C |
| Thermal Chuck Temperature Stability | ±0.08°C |
| Thermal Chuck Temperature Accuracy | 0.1°C |
| Thermal Chuck Temperature Uniformity | <±0.5°C |
| Thermal Chuck Surface Flatness | <10μm |
| Thermal Chuck Heating and Cooling Rates | 20 to 200°C <30min, 200 to 20°C <30min |
| Thermal Chuck Electrical Isolation | >10TΩ at 25°C |
| Thermal Chuck Leakage Current | <15fA at 25°C, <30fA at 200°C |
| Thermal Chuck Capacitance | <900pF |
| Thermal Chuck Max Voltage | 500V DC |
| System Controller CPU | Intel Core i7-7700, 3.6GHz, 8M Cache |
| System Controller RAM | DDR4 2400MHz 16GB |
| System Controller Storage | SSD 500GB |
| System Controller Operating System | Windows 10 Professional (English) |
| System Controller Power | 460W |
| System Controller LAN Interface | One internal and one external TCP/IP ports |
| System Controller USB Ports | Internal (on PC) x3, external x1 |
| System Controller GPIB Interface | Optional |
| System Dimensions | 980mm×1100mm×1650mm |
| System Weight | 550kg |
Applications
Key Features
Datasheet
Supplier Information
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