MPI TS150-THZ 150 mm Manual Probe System
The MPI TS150-THZ is a manual probe system explicitly designed for accurate mmW and THz measurements, offering seamless integration with VNA frequency extenders and advanced calibration techniques.
Specification Snapshot
Capacitance
<750pF
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Overview
The MPI TS150-THZ is a manual probe system explicitly designed for accurate mmW and THz measurements, offering seamless integration with VNA frequency extenders and advanced calibration techniques.
Specifications
| Parameter | Value |
|---|---|
| Total Travel Range | 180x300mm (7.1x11.8in) |
| Fine-travel range | 25x25mm |
| Fine-travel resolution | <1.0μm (0.04mils)@500μm/rev |
| Planarity | <10μm |
| Theta Travel (Standard) | 360° |
| Theta Travel (Fine) | ±5.0° |
| Theta Resolution | 7.5x10^-3 gradient |
| Travel Range | 10mm (0.4in) |
| Movement Range | 50x50mm (2x2in) |
| Resolution | <5μm (0.2mils) |
| Probe Platen Design | Nickel plated steel |
| Probe Platen Design | low profile |
| Probe Platen Design | four pole support |
| Platen Lift Control | 3 positions - contact (0), separation (300μm), loading (3mm) |
| Separation Repeatability | <1μm (0.04mils) |
| RF MicroPositioner Mounting | Magnetic with guided rail |
| DC MicroPositioner Mounting | Magnetic |
| RF Wafer Chuck Diameter | 160mm |
| RF Wafer Chuck Material | Nickel plated aluminum |
| Surface Planarity | ≤5μm |
| Rigidity | <15μm/10N@edge |
| mmW Wafer Chuck Diameter | 160mm |
| mmW Wafer Chuck Material | Ceramic |
| Maximal wafer size | 150mm |
| Temperature Control Method | Cooling air/Resistance heater |
| Coolant | Air (user supplied) |
| Temperature Stability | ±0.5°C |
| Temperature Accuracy | ±1°C |
| Surface Flatness | <15μm |
| Electrical Isolation | >0.5TΩ@25°C |
| Capacitance | <750pF |
| Maximum Voltage Between Chuck Top and GND | 500V DC |
| Vibration Isolation Table Dimensions (Standard) | 900x800x835mm (35.4x31.5x32.9in) |
| Vibration Isolation Table Dimensions (Advanced) | 900x800x830mm (35.4x31.5x32.7in) |
| Weight | Approx. 210kg (463lb) |
Applications
1. Wafer-level antenna characterization 2. mmW and THz frequency measurements 3. 5G and automotive applications 4. Non-invasive spectroscopy and security 5. High-speed 5G communication
Key Features
1. High mechanical stability and repeatability 2. Seamless integration with VNA frequency extenders 3. Advanced calibration techniques for metrology-level accuracy 4. Modular thermal and non-thermal chucks 5. Compact design for efficient space utilization 6. Probe hover control for precise alignment 7. Air bearing stage for single-handed operation 8. Advanced RF accessories for enhanced performance
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>
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