MPI TS150-THZ 150 mm Manual Probe System

MPI TS150-THZ 150 mm Manual Probe System

Supplier
Ybsemi-Solution
Part Number
MPI TS150-THZ 150 mm Manual Probe System
Category
Probe Station
Origin
China

The MPI TS150-THZ is a manual probe system explicitly designed for accurate mmW and THz measurements, offering seamless integration with VNA frequency extenders and advanced calibration techniques.

Specification Snapshot
Capacitance
<750pF
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Overview

The MPI TS150-THZ is a manual probe system explicitly designed for accurate mmW and THz measurements, offering seamless integration with VNA frequency extenders and advanced calibration techniques.

Specifications

ParameterValue
Total Travel Range180x300mm (7.1x11.8in)
Fine-travel range25x25mm
Fine-travel resolution<1.0μm (0.04mils)@500μm/rev
Planarity<10μm
Theta Travel (Standard)360°
Theta Travel (Fine)±5.0°
Theta Resolution7.5x10^-3 gradient
Travel Range10mm (0.4in)
Movement Range50x50mm (2x2in)
Resolution<5μm (0.2mils)
Probe Platen DesignNickel plated steel
Probe Platen Designlow profile
Probe Platen Designfour pole support
Platen Lift Control3 positions - contact (0), separation (300μm), loading (3mm)
Separation Repeatability<1μm (0.04mils)
RF MicroPositioner MountingMagnetic with guided rail
DC MicroPositioner MountingMagnetic
RF Wafer Chuck Diameter160mm
RF Wafer Chuck MaterialNickel plated aluminum
Surface Planarity≤5μm
Rigidity<15μm/10N@edge
mmW Wafer Chuck Diameter160mm
mmW Wafer Chuck MaterialCeramic
Maximal wafer size150mm
Temperature Control MethodCooling air/Resistance heater
CoolantAir (user supplied)
Temperature Stability±0.5°C
Temperature Accuracy±1°C
Surface Flatness<15μm
Electrical Isolation>0.5TΩ@25°C
Capacitance<750pF
Maximum Voltage Between Chuck Top and GND500V DC
Vibration Isolation Table Dimensions (Standard)900x800x835mm (35.4x31.5x32.9in)
Vibration Isolation Table Dimensions (Advanced)900x800x830mm (35.4x31.5x32.7in)
WeightApprox. 210kg (463lb)

Applications

1. Wafer-level antenna characterization 2. mmW and THz frequency measurements 3. 5G and automotive applications 4. Non-invasive spectroscopy and security 5. High-speed 5G communication

Key Features

1. High mechanical stability and repeatability 2. Seamless integration with VNA frequency extenders 3. Advanced calibration techniques for metrology-level accuracy 4. Modular thermal and non-thermal chucks 5. Compact design for efficient space utilization 6. Probe hover control for precise alignment 7. Air bearing stage for single-handed operation 8. Advanced RF accessories for enhanced performance

Datasheet

Product Datasheet
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Supplier Information

Yb
Ybsemi-Solution
View Supplier →
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> &nbsp; &nbsp; &nbsp; At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> &nbsp; &nbsp; &nbsp; The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>

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