TS200-THZ

TS200-THZ

Supplier
Ybsemi-Solution
Part Number
TS200-THZ
Category
Probe Station
Origin
China

The TS200-THZ is a 200 mm manual probe system designed for precise testing of mm-wave, THz, and automated impedance tuner applications.

Specification Snapshot
Capacitance
<750pF
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Overview

The TS200-THZ is a 200 mm manual probe system designed for precise testing of mm-wave, THz, and automated impedance tuner applications.

Specifications

ParameterValue
Total Travel Range255x325mm (10.0x12.8in)
Fine Travel Range25x25mm
Fine Travel Resolution<1.0μm (0.04mils)@500μm/rev
Planarity<10μm
Theta Travel (Standard)360°
Theta Travel (Fine)±5.0°
Theta Resolution7.5x10⁻³ gradient
Chuck Z Stage Travel Range10mm (0.4in)
Chuck Z Stage Fine Travel Resolution<1.0μm (0.04mils)@500μm/rev
Manual Microscope Stage Movement Range50x50mm (2x2in) or 80x80mm (3.15x3.15in)
Resolution<5μm (0.2mils)
Scope LiftManual; tilt-back or vertical
MovementIndependently controlled X and Y movement with locking screws
Probe Platen DesignLow profile
Probe Platen Designfour pole support
MaterialNickel plated steel
Separation Repeatability<1μm (0.04mils)
Platen Lift Control3 positions - contact (0), separation (300μm), loading (3mm)
RF MicroPositioner MountingMagnetic with guided rail
DC MicroPositioner MountingMagnetic
RF Wafer Chuck Diameter210mm
MaterialNickel plated aluminum
Surface Planarity≤5μm
Rigidity<15μm/10N@edge
Electrical Isolation>2GΩ
Temperature range35°C to 150°C
Temperature Stability±0.5°C
Temperature Accuracy±1°C
Surface Flatness<15μm
Heating and Cooling Rates35°C to 150°C <12min; 150°C to 35°C <15min
Electrical Isolation>0.5TΩ@25°C
Leakage@10VN/A
Capacitance<750pF
Maximum Voltage500V DC
Vibration Isolation Table Dimensions900x800x835mm (35.4x31.5x32.9in)
WeightApprox. 210kg (463lb)

Applications

1. mm-wave testing 2. THz frequency testing 3. Automated impedance tuner integration

Key Features

1. Seamless integration of frequency extenders 2. High mechanical stability and repeatability 3. Ergonomic design with single-handed operation 4. Optional vibration isolation support

Datasheet

Product Datasheet
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Supplier Information

Yb
Ybsemi-Solution
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<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> &nbsp; &nbsp; &nbsp; At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> &nbsp; &nbsp; &nbsp; The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>

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