TS200-THZ
The TS200-THZ is a 200 mm manual probe system designed for precise testing of mm-wave, THz, and automated impedance tuner applications.
Specification Snapshot
Capacitance
<750pF
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Overview
The TS200-THZ is a 200 mm manual probe system designed for precise testing of mm-wave, THz, and automated impedance tuner applications.
Specifications
| Parameter | Value |
|---|---|
| Total Travel Range | 255x325mm (10.0x12.8in) |
| Fine Travel Range | 25x25mm |
| Fine Travel Resolution | <1.0μm (0.04mils)@500μm/rev |
| Planarity | <10μm |
| Theta Travel (Standard) | 360° |
| Theta Travel (Fine) | ±5.0° |
| Theta Resolution | 7.5x10⁻³ gradient |
| Chuck Z Stage Travel Range | 10mm (0.4in) |
| Chuck Z Stage Fine Travel Resolution | <1.0μm (0.04mils)@500μm/rev |
| Manual Microscope Stage Movement Range | 50x50mm (2x2in) or 80x80mm (3.15x3.15in) |
| Resolution | <5μm (0.2mils) |
| Scope Lift | Manual; tilt-back or vertical |
| Movement | Independently controlled X and Y movement with locking screws |
| Probe Platen Design | Low profile |
| Probe Platen Design | four pole support |
| Material | Nickel plated steel |
| Separation Repeatability | <1μm (0.04mils) |
| Platen Lift Control | 3 positions - contact (0), separation (300μm), loading (3mm) |
| RF MicroPositioner Mounting | Magnetic with guided rail |
| DC MicroPositioner Mounting | Magnetic |
| RF Wafer Chuck Diameter | 210mm |
| Material | Nickel plated aluminum |
| Surface Planarity | ≤5μm |
| Rigidity | <15μm/10N@edge |
| Electrical Isolation | >2GΩ |
| Temperature range | 35°C to 150°C |
| Temperature Stability | ±0.5°C |
| Temperature Accuracy | ±1°C |
| Surface Flatness | <15μm |
| Heating and Cooling Rates | 35°C to 150°C <12min; 150°C to 35°C <15min |
| Electrical Isolation | >0.5TΩ@25°C |
| Leakage@10V | N/A |
| Capacitance | <750pF |
| Maximum Voltage | 500V DC |
| Vibration Isolation Table Dimensions | 900x800x835mm (35.4x31.5x32.9in) |
| Weight | Approx. 210kg (463lb) |
Applications
1. mm-wave testing 2. THz frequency testing 3. Automated impedance tuner integration
Key Features
1. Seamless integration of frequency extenders 2. High mechanical stability and repeatability 3. Ergonomic design with single-handed operation 4. Optional vibration isolation support
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>
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