MPI TS50 50 mm Manual Probe System
The MPI TS50 is a 50 mm manual probe system designed for accurate and reliable DC/CV and RF measurements, ideal for research, development, and academic use in IC engineering.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Total Travel Range | 100×75mm (3.9×3.0in) |
| Fine Travel Range | 25×25mm fine micrometer control |
| Fine Travel Resolution | <2.0μm (0.08mils) @500μm/rev |
| Planarity | <10μm |
| Theta Travel (Standard) | 360° |
| Theta Travel (Fine) | ±5.0° |
| Theta Resolution | 7.5×10^-3 gradient |
| Movement Control | Guided rail with instant lock mechanism |
| Material | Steel |
| Dimensions | 250mm (Inside), 408mm (Outside) |
| Chuck Top to Platen Top | Min. 28mm |
| Max. No of MicroPositioners | 6 DC and 2 RF |
| Platen Z-Height Movement | High resolution screw for fine control |
| Z-Height Adjustment Range | Max. 25mm (1in) |
| DC Positioner Mounting | Magnetic |
| RF Positioner Mounting | Magnetic with guide rail |
| Standard Wafer Chuck Diameter | 56mm |
| Standard Wafer Chuck Material | Stainless steel |
| Standard Wafer Chuck Surface | Planar with centric engraved vacuum grooves |
| Vacuum Grooves Sections (Diameter) | 4, 16, 30, 44mm |
| Vacuum Actuation | Multizone control - All connected in meander shape, center hole in 4mm diameter |
| Supported DUT Sizes | Single DUT 5×5mm size or wafers up to 50mm (2in) |
| Surface Planarity | ≤5μm |
| Rigidity | <15μm/10N @edge |
| RF Wafer Chuck Diameter | 50mm with 1 integrated AUX area |
| RF Wafer Chuck Material | Stainless steel with HF/OPTO surface (flat with 0.5mm holes) |
| RF Wafer Chuck Surface | Planar with 0.5mm diameter holes in centric sections |
| RF Vacuum Holes Sections (Diameter) | 4, 16, 30, 44mm |
| RF Vacuum Holes Actuation | Multizone control - vacuum hole on top, all connected at bottom in meander shape |
| RF Supported DUT Sizes | Single DUT 5×5mm size or wafers up to 50mm (2in) |
| RF Surface Planarity | ≤5μm |
| RF Rigidity | <15μm/10N @edge |
| Auxiliary Chuck Quantity | 1 AUX chuck |
| Auxiliary Chuck Position | Integrated to rear side of main chuck |
| Auxiliary Chuck Substrate Size (WxL) | Max. 25×25mm (1.0×1.0in) |
| Auxiliary Chuck Material | Ceramic |
| Auxiliary Chuck Material | RF absorbing material for accurate calibration |
| Auxiliary Chuck Surface Planarity | ≤5μm |
| Auxiliary Chuck Vacuum Control | Controlled independently |
| Auxiliary Chuck Vacuum Control | separate from chucks |
| Operation Voltage | Standard - in accordance with EC 61010, certificates for higher voltages available upon request |
| Maximum Voltage Between Chuck Top and GND | 500V DC |
| Isolation | >2GΩ |
| Power | 100-240V AC nominal; 50/60Hz for optical accessories only |
| Vacuum Pressure | ~0.5bar (for single DUT)/~0.3bar (for wafers) |
| Compressed Air Pressure | 0.2-0.7MPa (2.0-7.0bar) |
| Station Platform Dimensions (WxDxH) | 300×300×590mm (11.8×11.8×23.2in) |
| Station Platform Weight | ~30kg (66lb) |
Applications
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