MSA-600 Micro System Analyzer
The MSA-600 Micro System Analyzer is an advanced optical measurement workstation designed for characterizing dynamic responses and surface topography of MEMS and microstructures. It combines real-time vibration analysis, planar motion analysis, and surface topography analysis in a single system.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Frequency Response Range | up to 6GHz |
| Displacement Resolution | sub-picometer |
| Frequency Bandwidth | up to 2.5GHz |
| Displacement Measurement Resolution | 5nm |
| Surface Topography Resolution | sub-nanometer (vertical), sub-micrometer (horizontal) |
| Measurement Modes | Real-time vibration analysis, planar motion analysis, surface topography analysis |
| Optical Accessories | Michelson and Mirau lenses |
| Optical Accessories | special lenses for vacuum and pressure chambers |
| System Configurations | Standard SHF (6GHz OOP), UHF (600MHz OOP), HF (300MHz OOP), LF (2.5MHz OOP) |
| Upgrade Options | 2.5GHz OOP, 1.3GHz OOP |
| Measurement Principle | Laser Doppler vibrometry, stroboscopic video microscopy, white-light interferometry |
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