TruPlasma RF Series 1000/3000
The TruPlasma RF Series 1000/3000 provides high-frequency generators designed for plasma applications, offering stable output power, high control accuracy, and exceptional energy efficiency.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Output Power Range TruPlasma RF 1001 (G2/13) | 1W...1000W |
| Output Power Range TruPlasma RF 1002 (G2/13) | 1W...2000W |
| Output Power Range TruPlasma RF 1003 (G2/13) | 1W...3000W |
| Maximum Reflected Power | 600W |
| Output Frequency | 13.56MHz ±0.005% |
| Output Impedance | 50Ω |
| Harmonic Signals at Full Nominal Output Power | -40dBc |
| Spurious Signals at Full Nominal Output Power | -50dBc |
| Power Accuracy at 50Ω Load | ±1W or ±1% |
| Fluctuation at 50Ω Load | ±1W |
| Reproducibility of Output Power at 50Ω Load | ±2W or ±1% |
| Regulation Mode | Forward power |
| Regulation Mode | load power |
| Regulation Mode | external voltage |
| Pulse Mode | 1Hz to 50kHz, internal and external signal source |
| Frequency Agility | ±678kHz (±5%) optional |
| Interfaces | Analog: DeviceNet, RS232/485, SystemPort or EtherCAT, Profibus |
| Sync (CEX; pulse; arc) | Yes |
| Mains Voltage | 200-480VAC ±10%, 3 phases + PE |
| Overall Efficiency at Full Nominal Power | 72%-80% (typ.) |
| Power Factor (cosφ) | 0.95 |
| Mains Power Consumption at Full Nominal Power | 1.8kVA-4.3kVA |
| Ambient Temperature | 5°C...35°C |
| Cooling Medium | Water |
| Min. Throughput at 13.56MHz Operation | 4l/min |
| Max. Water Pressure | 7bar |
| Max. Differential Pressure | 1.1bar |
| Protection Class | 30 |
| Dimensions (W x H x D) | 216x128.5x405mm (3HU) |
| Weight | 18kg |
| Standards and Directives | SEMI F47, SEMI S2, UL, CSA, CE, RoHS |
Applications
Key Features
Datasheet
Supplier Information
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