Wafer Scribing Machine
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Overview
Specifications
| Parameter | Value |
|---|---|
| Parameter value | |
| ≤ 10μm (factory parallelism/flatness/verticality/right angle) | |
| ±0.5μm | |
| 3μm | |
| ±3μm | |
| 1920pixel×2560pixel1pix | |
| 1pix=1μm (field of view within 2mm) | |
| Picosecond laser | |
| Galvanometer/exit head | |
| 300nm | |
| Temperature range 10-40°, ±0.1 degrees | |
| 8 inches and below | |
| 1800KG | |
| < 50μm (line width) position +0.01mm | |
| < 50μm (line width) position +0.01mm |
Key Features
Datasheet
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Supplier Information
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