Domestic BF33
Borosilicate Glass Mainly SiO2/B2O3,Float-Formed with High Native Flatness on Both Sides,General Microelectronic/Optical Specialty Glass.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Quartz-Glass Wafer Substrate - Domestic Grade | Fused Silica: Domestic JGS1, JGS2, JGS3; Borosilicate Glass: Domestic BF33; YOFC Silica YS-1330 and Others |
| Quartz-Glass Wafer Substrate - Imported Grade | Germany Schott BF33, USA Corning 7980, Japan Ohara SK-1300 and Others |
| Quartz-Glass Wafer Substrate - Diameter | 25.4mm |
| Quartz-Glass Wafer Substrate - Diameter | 50.8 mm |
| Quartz-Glass Wafer Substrate - Diameter | 100mm |
| Quartz-Glass Wafer Substrate - Diameter | 150mm |
| Quartz-Glass Wafer Substrate - Diameter | 200mm |
| Quartz-Glass Wafer Substrate - Diameter | 300mm |
| Quartz-Glass Wafer Substrate - Thickness (Ultrathin Thickness) [Diameter: 25.4mm] | 150μm; 500μm |
| Quartz-Glass Wafer Substrate - Thickness (Ultrathin Thickness) [Diameter: 50.8 mm] | 150μm; 500μm |
| Quartz-Glass Wafer Substrate - Thickness (Ultrathin Thickness) [Diameter: 100mm] | 100μm; 500μm |
| Quartz-Glass Wafer Substrate - Thickness (Ultrathin Thickness) [Diameter: 150mm] | 200μm; 500μm; 725μm; 1000μm |
| Quartz-Glass Wafer Substrate - Thickness (Ultrathin Thickness) [Diameter: 200mm] | 200μm; 725μm; 1000μm |
| Quartz-Glass Wafer Substrate - Thickness (Ultrathin Thickness) [Diameter: 300mm] | 300μm; 725μm; 1000μm |
| Quartz-Glass Wafer Substrate - Surface Roughness | Double Sides Polished, Ra＜ 1.0nm |
| Quartz-Glass Wafer Substrate - Orientation - Flat [Diameter: 25.4mm] | 8mm |
| Quartz-Glass Wafer Substrate - Orientation - Flat [Diameter: 50.8 mm] | 16mm |
| Quartz-Glass Wafer Substrate - Orientation - Flat [Diameter: 100mm] | 30mm |
| Quartz-Glass Wafer Substrate - Orientation - Flat [Diameter: 150mm] | 47.5mm |
| Quartz-Glass Wafer Substrate - Orientation - Notch [Diameter: 150mm] | Semi-Notch |
| Quartz-Glass Wafer Substrate - Orientation - Notch [Diameter: 200mm] | Semi-Notch |
| Quartz-Glass Wafer Substrate - Orientation - Notch [Diameter: 300mm] | Semi-Notch |
| Quartz-Glass Wafer Substrate - Surface Finish | S/D 60/40, S/D 40/20 |
| Quartz-Glass Wafer Substrate - Edge Exclusion | ≤ 2mm |
| Quartz-Glass Wafer Substrate - Surface Figure [Diameter: 25.4mm] | TTV＜ 2μm |
| Quartz-Glass Wafer Substrate - Surface Figure [Diameter: 50.8 mm] | TTV＜ 2μm |
| Quartz-Glass Wafer Substrate - Surface Figure [Diameter: 100mm] | TTV＜ 2μm |
| Quartz-Glass Wafer Substrate - Surface Figure [Diameter: 150mm] | TTV＜ 2μm |
| Quartz-Glass Wafer Substrate - Surface Figure [Diameter: 200mm] | TTV＜ 2μm |
| Quartz-Glass Wafer Substrate - Surface Figure [Diameter: 300mm] | TTV＜ 2μm |
| Mechanical Properties - Density ρ (at 25°C) | 2.23 g/cm³ |
| Mechanical Properties - Young's Modulus E (According to DIN 13316) | 64kN/mm² |
| Mechanical Properties - Poisson's Ratio μ (According to DIN 13316) | 0.2 |
| Mechanical Properties - Knoop Hardness HK₁/20 (According to DIN ISO 9385) | 480 |
| Chemical Properties - Water Resistance | (According to ISO 719/DIN 12 111) HGB 1 |
| Chemical Properties - Water Resistance | (According to ISO 720) HGA 1 |
| Chemical Properties - Acid Resistance | (According to DIN 12 116) 1 |
| Chemical Properties - Acid Resistance | (According to ISO 1776) ≤100 μgNa2O per 100cm2 |
| Chemical Properties - Alkali Resistance | (According to ISO 695/DIN 52 322) A 2 |
| Thermal Properties - Specific Heat Capacity cp (20-100℃) | 0.83 kJ/(kg.K) |
| Thermal Properties - Thermal Conductivity λ (90℃) | 1.2 W/(m ·K) |
| Thermal Properties - Phase Transition Temperature Tg* (According to ISO 7884) | 525℃ |
Applications
Key Features
Datasheet
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