NAPHIA™ Series Sapphire Wafers
Orbray introduced the NAPHIA™ sapphire wafer series for development of new semiconductor devices and to address substrate related issues. In addition to conventional standard grade sapphire substrates, higher specifications such as high flatness and cleanliness are available.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Standard diamter | φ2″、3″、4″、6″、8″、12″ |
| Crystal Plane Orientation | c-plane; r-plane; m-plane; a-plane |
| Surface Finish | Double Sided Polished 、 Single Sided Polished |
| thickness tolerance [Standard Specification] | ±15~25 μm |
| thickness tolerance [Special Specification] | ±0.3 μm |
| Total thickness variation TTV [Standard Specification] | ≤10~20 μm |
| Total thickness variation TTV [Special Specification ； Double Sided Polished] | ≤2.5 μm |
| Total thickness variation TTV [Special Specification ； Single Sided Polished] | ≤3.0 μm |
Applications
Key Features
Datasheet
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