Miniaturized Single-Piezoelectric Deformable Mirror DM61-15
A Single Piezoelectric Material Layer Drives a Highly Flat Mirror. Proprietary Bias-Drive Technology Enables Bidirectional Aberration Correction Under Positive Voltage, Improving Deformable Mirror Performance.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Effective Aperture | 15 mm |
| Number of Drivers | 61 |
| Operating Voltage | 0–100 V |
| Mirror Quality (Wavefront) [RMS] | <20 nm |
| Correction Capability [Zernike Aberrations] | First 35 Terms |
| Actuator Wavefront Deformation PV | ±5 µm |
| Resonant Frequency | ~2 kHz |
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Key Features
Datasheet
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