Composite quartz material FCMQZ
The middle layer is FSTQZ®W high-purity white opaque quartz, retaining excellent insulation. Semiconductor-grade transparent quartz on both sides avoids opaque-material particle shedding at high temperature and improves stability. Fused, void-free layers offer excellent cold/hot processing for wafer-process insulation. Custom transparent grades include FLH321, FLH321H, FLH621, FLH621H, and F-HUV. The English description likewise specifies FSTQZ®W opaque quartz between semiconductor-grade transparent layers, fused without voids for thermal insulation and cold/hot processing; its listed custom transparent grades are FLH321, FLH321H, FLH621, FLH621H, and F-HUV.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Impurity element Al [Opaque layer FSTQZ®W; Mean impurity values] | 12.29 ppm |
| Impurity element Ca [Opaque layer FSTQZ®W; Mean impurity values] | 1.05 ppm |
| Impurity element Mg [Opaque layer FSTQZ®W; Mean impurity values] | 0.03 ppm |
| Impurity element Fe [Opaque layer FSTQZ®W; Mean impurity values] | 0.53 ppm |
| Impurity element Ni [Opaque layer FSTQZ®W; Mean impurity values] | 0.01 ppm |
| Impurity element Mn [Opaque layer FSTQZ®W; Mean impurity values] | 1.42 ppm |
| Impurity element K [Opaque layer FSTQZ®W; Mean impurity values] | 0.98 ppm |
| Impurity element Na [Opaque layer FSTQZ®W; Mean impurity values] | 0.30 ppm |
| Impurity element Zr [Opaque layer FSTQZ®W; Mean impurity values] | 0.47 ppm |
| Impurity element Ti [Opaque layer FSTQZ®W; Mean impurity values] | 1.62 ppm |
| Total impurities [Opaque layer FSTQZ®W; Mean impurity values] | 18.72 ppm |
| Impurity element Al [Transparent Layer FLH621; Average Impurity Values] | 14.2 ppm |
| Impurity element Ca [Transparent Layer FLH621; Average Impurity Values] | 0.60 ppm |
| Impurity element Mg [Transparent Layer FLH621; Average Impurity Values] | 0.05 ppm |
| Impurity element Cu [Transparent Layer FLH621; Average Impurity Values] | 0.01 ppm |
| Impurity element Fe [Transparent Layer FLH621; Average Impurity Values] | 0.23 ppm |
| Impurity element Ni [Transparent Layer FLH621; Average Impurity Values] | 0.05 ppm |
| Impurity element Mn [Transparent Layer FLH621; Average Impurity Values] | 0.05 ppm |
| Impurity element Li [Transparent Layer FLH621; Average Impurity Values] | 0.44 ppm |
| Impurity element K [Transparent Layer FLH621; Average Impurity Values] | 0.25 ppm |
| Impurity element Na [Transparent Layer FLH621; Average Impurity Values] | 0.12 ppm |
| Impurity element Ti [Transparent Layer FLH621; Average Impurity Values] | 1.3 ppm |
| Impurity element B [Transparent Layer FLH621; Average Impurity Values] | 0.08 ppm |
| Total impurities [Transparent Layer FLH621; Average Impurity Values] | 17.38 ppm |
| Length / Diameter [Core (source term: tuoxin); No unit stated in the table] | 460 |
| Height / Thickness [Core (source term: tuoxin); No unit stated in the table] | 30 |
| Length / Diameter [Front/back plate; No unit stated in the table] | 500 |
| Width [Front/back plate; No unit stated in the table] | 500 |
| Height / Thickness [Front/back plate; No unit stated in the table] | 30 |
| Length / Diameter [Rectangular bar; No unit stated in the table] | 800 |
| Width [Rectangular bar; No unit stated in the table] | 250 |
| Height / Thickness [Rectangular bar; No unit stated in the table] | 60 |
| Length / Diameter [Ring; No unit stated in the table] | 580 |
| Width [Ring; No unit stated in the table] | 365 |
| Height / Thickness [Ring; No unit stated in the table] | 130 |
| Length / Diameter [FCMQZ disc; No unit stated in the table] | 400 |
| Height / Thickness [FCMQZ disc; No unit stated in the table] | 0.75+2+0.75、1+4+1、0.75+2+3.25 |
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Key Features
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