LL20 Series Excimer Lasers

LL20 Series Excimer Lasers

Supplier
Exclaser
Part Number
LL20/LL20E/……
Category
Laser Modules & Systems
Origin
China

The EXCI LL20-series excimer laser provides pulse energy up to 800millijoules, excellent pulse stability/beam uniformity and easy integration. Applications include PLD, wafer separation or dicing, LLO and FBG writing. Features: Hundreds-of-millijoules energy; 193nm, 248nm, 308nm and 351nm wavelengths; wafer and thin-film processing, including pulsed laser deposition. Brand: EXCI. Models: LL20/LL20E/… . Origin: China. Dimensions: L1500mm×W550mm×H780mm. Weight: About300kg.

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Overview

The EXCI LL20-series excimer laser provides pulse energy up to 800millijoules, excellent pulse stability/beam uniformity and easy integration. Applications include PLD, wafer separation or dicing, LLO and FBG writing. Features: Hundreds-of-millijoules energy; 193nm, 248nm, 308nm and 351nm wavelengths; wafer and thin-film processing, including pulsed laser deposition. Brand: EXCI. Models: LL20/LL20E/… . Origin: China. Dimensions: L1500mm×W550mm×H780mm. Weight: About300kg.

Applications

1.Suitable for laser pulsed deposition coating; 2.Suitable for laser lift-off; 3.Suitable for laser annealing; 4.Suitable for material surface treatment; 5.Suitable for precision machining;etc.

Key Features

1.Pulse energy up to 800mJ. 2.Metal-ceramic cavity, active purification, and corrosion-resistant discharge electrodes improve laser performance and economy.

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Supplier Information

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Exclaser
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Hefei Excimer Laser Technology Co., Ltd. (For Short "EXCI") is founded by researchers from the Chinese Academy of Sciences. It is a world‑leading high‑tech enterprise specializing in independent R&D and industrialization of excimer lasers. The company focuses on complete‑machine R&D, large‑scale manufacturing and customized scenario‑oriented solution development for high‑end excimer lasers. Its products serve high‑end scientific research, precision industry and medical sectors, covering excimer laser annealing, lift‑off, repair, photolithography, pulsed laser deposition, superconducting tape fabrication, fiber Bragg grating inscription, and excimer laser medical devices. We provide standardized mass production, personalized customization and full‑life‑cycle maintenance services for multi‑power and multi‑category equipment. Excimer laser technology represents a scarce core technology for high‑end equipment. Worldwide, only more than ten enterprises across six countries (China, Germany, the United States, Japan, Canada and Russia) possess independent mass‑production core capabilities. ExciLaser ranks among the world’s first‑tier players. Committed to independent and controllable core technologies, the company precisely fills domestic gaps in the high‑end excimer laser industry. It has overcome multiple key bottleneck technologies, realized domestic substitution of high‑end laser equipment, and effectively broken overseas technological monopolies. Founded in March 2023, the company holds qualifications including National High‑Tech Enterprise, National Science‑ and Technology‑based Small‑ and Medium‑Sized Enterprise, and enterprise status in Hefei’s key industrial‑chain catalog. It has obtained ISO 9001 Quality Management System Certification. The company owns numerous invention patents, utility‑model patents and software copyrights, establishing a complete and independent intellectual‑property protection system to continuously underpin technological iteration, product upgrading and industrial implementation.

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