The “nanoruler” laser displacement sensor uses laser self-sensing to combine centimeter-scale range and 5nm resolution. Intrinsic self-calibration needs no external calibration and maintains long-term stability for semiconductors, high-end machine tools and aerospace manufacturing. Four core traits are centimeter range, nanometer resolution, inherent linearity and self-calibration, reducing calibration/maintenance costs. 5. Principle: Ø Laser as sensor—high frequency sensitivity to cavity-length changes makes the cavity the sensing unit. Ø Frequency splitting/polarization—birefringence splits frequencies, and orthogonal polarization-mode competition converts continuous length changes into periodic polarization changes. Ø Signal processing—a polarizing splitter and direction logic convert these changes to directional displacement pulses. Ø Innovation—a cat's-eye cavity mirror addresses detuning, limited range and difficult alignment. Quantitative polarization-mode competition and power-tuning control enable nanometer interpolation.
| Parameter | Value |
| Resolution / Accuracy | Basic resolution λ/8 (79nm), reaching 5nm with electronic interpolation, with nanometer-level measurement accuracy throughout the range. |
| Measurement Range (Centimeter Scale) [632.8nm Standard Laser Version; Typical Measurement Range] | 632.8nm standard laser version: typical range 40mm |
| Measurement Range (Centimeter Scale) [1.15μm laser extension version; maximum expansion up to] | 1.15μm extended laser version: maximum extension 100mm |
| Linearity & Self-Calibration | Intrinsically linear measurement principle; automatically self-calibrates once per λ/2 displacement cycle. Self-calibration is inherent to the device and requires no external reference. |
Precision services for semiconductor lithography/wafer inspection, CNC tools, aerospace engines, scientific instruments, and biomedical equipment. 4.Application details: ØSemiconductors: stage displacement feedback, wafer warp/thickness, chip-process micromotion; ØManufacturing: five-axis guide positioning/precision-feed calibration; ØAerospace: engine-part geometric tolerances/assembly micromotion; ØResearch: table feedback/micro-nano positioning; ØBiomedical: micromanipulation/high-precision instrument displacement sensing.
2. Three core characteristics. Ø Wide range and precision: Overcomes the traditional range/accuracy conflict, maintaining 5nm resolution over 40–100mm, a combination unavailable in commercial sensors. Ø Intrinsic self-calibration: No external reference or frequent calibration, no long-term accuracy drift, fewer external calibration procedures and lower maintenance costs. Ø Stability and immunity: Complete instrument processes and safeguards provide long-term industrial operation with better adaptability than conventional micron-scale inductive/capacitive sensors. 3. Innovations. Ø Original laser self-sensing displacement principle, distinct from interferometry and triangulation. Ø Cat's-eye retroreflector cavity mirror resolves detuning, expands range and simplifies alignment. Ø Polarization-mode competition calculation quantifies orthogonal modes, locking λ/8 base resolution and interpolating to 5nm. Ø Complete manufacturing, calibration and noise-reduction processes support continuous industrial use.
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Beijing Leice Technology Co., Ltd. (abbreviated as Leice Technology) is a high-tech enterprise and a Beijing specialized and sophisticated SME. It focuses on high-precision laser measurement instruments and equipment, providing full-chain technical solutions. Its main products include birefringent dual-frequency laser interferometers, non-contact laser feedback interferometers, optical element internal stress (phase retardation) measuring instruments, laser nano rulers, etc., serving industries such as mechanical manufacturing, microelectronics, and optical processing. The company has mastered core technologies for dual-frequency lasers and can mass-produce large frequency difference, high-power dual-frequency lasers. Its technology was selected as one of China's Top 10 Optical Industry Technologies in 2022. It is committed to being a premier supplier of precision measurement systems and solutions, helping users improve manufacturing capabilities and scientific research levels.