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New Ion Source Rendering
Optical Production Equipment

New Ion Source Rendering

Supplier
Cdcky
Category
Optical Production Equipment
Origin
China

Used for substrate ion bombardment cleaning during the vacuum coating process and ion bombardment energy delivery during the deposition process.

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Overview

Used for substrate ion bombardment cleaning during the vacuum coating process and ion bombardment energy delivery during the deposition process.

Applications

Widely used in: anti-reflection films, eyeglass coating, fiber optics, high-reflection mirrors, hot/cold mirrors, low-drift filters, bandpass filters, in-line cleaning, diamond-like carbon deposition, etc.

Key Features

Advanced structure; fully drawing on the advantages of advanced domestic and foreign Hall ion sources, it has a unique water-cooling and sealing structure. Long-term experiments conducted many times have proven that the ion source can work stably for a long time under a very large plasma beam current.; Can work reliably for a long time in a high-temperature environment; In common coating processes, the workpiece needs to be heated to a very high temperature, and the temperature inside the entire vacuum chamber is very high, while the good cooling system of this ion source can ensure that the ion source works normally for a long time in a high-temperature environment of 300℃.; Large plasma beam current; To avoid substrate damage, a low-energy, large-beam plasma is needed for assisted coating. The multiple ion sources previously used domestically had small beam currents (<1.5A), making it difficult to achieve the desired effect. Our company has made breakthrough progress in the design and manufacturing technology of high-power Hall plasma sources, producing a plasma source that works stably for a long time under a large beam current (>4A).; Strong spatial uniformity; Due to the unique design of the magnetic circuit and discharge zone structure, the intensity uniformity of the plasma state within a 20-degree cone centered on the ion source axis can be maintained within ± 20%.; Fully suitable for reactive gases; In the ion beam assisted reactive deposition coating process, it is usually necessary to use oxygen or nitrogen, etc., to react with the evaporated coating material to deposit the required thin film. In this process, increasing the activity and energy of the reactive gas is crucial for forming a high-quality thin film. This plasma source can work normally under the condition of fully introducing a reactive gas and ionizing it without poisoning.; Easy installation, simple maintenance, and low operating cost; The installation of this ion source is very simple, the only consumable is the filament, and the daily maintenance work is mainly replacing the filament.; Simple operation; The operation of the ion source is simple; the ion source can work stably by adjusting the discharge current of the ion source and the filament current. The voltage and current of the filament and anode can be directly observed on the control panel.; Can improve film growth, optimize film structure, increase coating consistency and repeatability, achieve low-temperature and high-rate coating, remove water and hydrocarbons from the workpiece surface, increase film density, reduce internal stress, remove molecules with weak bonding force, increase reactive gas activity, and make film composition easy to control.

Datasheet

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Supplier Information

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Cdcky
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Chengdu Chuangkeyuan Vacuum Technology Co., Ltd., referred to as Chuangkeyuan, is a professional company integrating R&D, production, marketing, and after-sales service of vacuum equipment electrical systems. The main management, technical, operational, and assembly personnel are primarily former key staff from Nanguang and Nanyi, with over 20 years of experience in vacuum product production management and technology. The company's main products include: complete vacuum equipment control systems, new E-type electron guns, Hall ion sources, anode film ion sources, three-phase and single-phase power regulators, new film thickness monitors, various composite vacuum gauges, composite pressure controllers, etc., and has been recognized by many users for its high-quality products and excellent after-sales service. We are committed to providing customers with high-quality products and good after-sales service. With strong technical force and innovative business philosophy, we have formed a strong capability in complete equipment design, R&D, processing, and supporting. We are confident to do better in the vacuum industry! Adhering to the people-oriented, technology-leading concept, and the policy of equal emphasis on quality and service, with strong technological innovation strength and rich professional experience, we ensure that equipment quality is more professional, reliable, and stable to meet different customer needs. Choosing Chengdu Chuangkeyuan means choosing quality and peace of mind.

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