Laser Interferometric Length Measurement System
Product description: The laser interference length measurement system can calibrate gauge blocks, gauge rods, scales and coordinate measuring machines in a constant-temperature, constant-humidity and vibration-proof metrology room. It can perform precision measurement over large ranges of tens of meters, as well as precision measurement of tiny movements such as watch parts. It can measure geometric quantities such as length, angle, straightness, parallelism, flatness and perpendicularity, and can also be used in special occasions, such as micro-positioning in semiconductor lithography technology and measurement of recording track spacing on computer memories. While retaining the excellent performance of high stability, high precision and high sampling rate, the system integrates the light source and the measurement signal receiving and processing unit into the host, providing users with a more convenient, easy-to-use and friendly experience through the integrated design;
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Overview
Specifications
| Parameter | Value |
|---|---|
| Performance - Laser Frequency Stabilization Accuracy | ±0.02ppm |
| Performance - Measurement Range | 1 mm - 40 00 mm |
| Performance - Dynamic Acquisition Frequency | ＞1 00kHz ； |
| Performance - Measurement Wavelength | 632.99nm; (He-Ne laser) |
| Performance - Laser Power | ＞ 0.8mw |
| Performance - Function Modules | Temperature, pressure, humidity measurement module |
| Performance - Measurement System Intrinsic Stability | Less than or equal to 2nm@5min (with a high-precision environment provided by the user) |
| Interface - Signal Output | AB phase pulse |
| Interface - Communication | Ethernet communication |
| Interface - Control Software | Data display; channel switching |
| Interface - Development Interface | Supports secondary software development; DLL dynamic link library and user guide |
| Operating Requirements-System Temperature Environment | 1. System operating temperature 10°C-30°C 2. Temperature change rate <1.0°C/15min |
| Operating Requirements-Operating Humidity | 3 5%-60% |
| Operating Requirements-Vibration Environment | Vibration-isolated foundation at VC-C level or above |
| Operating Requirements-Power Supply | AC220V 50HZ |
Datasheet
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