Low-linked light interferometer OCR

Instrument Aperture: 9mm, optional amplifier cal. 50-800mm Light: Importing ammonia lasers, 1 = 632.8 mm Camera: 2Kx2K pixel

Dyna-Opti series dynamic interferometer;

Objective Lens: Infinite interference mirrors 2.5X, 5X, 10X, 20X, 50X (other customable); Infinite intervention lenses 10X (20X optional) Lateral Resolution: 0.4um ~10.2um, related to selected mirrors

The WLI series of white light interferometers are based on white light interferometry;

Measurement capability: Measurement of the 3D surface topography, roughness, step height, and film thickness of reflective materials and optical components Data acquisition mode: Adopts two measurement modes: Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI) Calibration system: Combines NIST traceable standards with automatic calibration algorithms

The surface roughness, step height, and film thickness inspection of semiconductor wafers, precision optical components, and thin-film coatings directly determines the yield of finished products. Traditional probe measurement easily scratches the workpiece, and ordinary optical equipment has insufficient precision. How can one balance non-destructive, nanometer high-precision, and efficient mass-production inspection? Wavelength Opto-Electronic's brand-new industrial-grade white light interferometer is equipped with dual interference measurement modes, using a non-contact inspection solution to connect the entire scenario from laboratory R&D to industrial production line quality inspection. Different from equipment with a single measurement mode, this instrument integrates dual-algorithm modes of Vertical Scanning Interferometry (VSI) + Phase Shifting Interferometry (PSI), and one device satisfies two types of measurement needs: PSI phase-shifting interferometry: specialized in nanometer-level tiny heights and ultra-thin films, with extreme microscopic resolution; VSI vertical scanning interferometry: suitable for measuring workpieces with large height differences and large steps, with sufficient range and no segmentation; Paired with a 450-700nm short-coherence white light source, it can effectively suppress multi-reflection stray light and has strong anti-interference ability. Multi-layer coatings and weakly reflective optical components can also output stable and clear interference signals, and measurement results are true and reliable.