White Light Interferometer

The surface roughness, step height, and film thickness inspection of semiconductor wafers, precision optical components, and thin-film coatings directly determines the yield of finished products. Traditional probe measurement easily scratches the workpiece, and ordinary optical equipment has insufficient precision. How can one balance non-destructive, nanometer high-precision, and efficient mass-production inspection? Wavelength Opto-Electronic's brand-new industrial-grade white light interferometer is equipped with dual interference measurement modes, using a non-contact inspection solution to connect the entire scenario from laboratory R&D to industrial production line quality inspection. Different from equipment with a single measurement mode, this instrument integrates dual-algorithm modes of Vertical Scanning Interferometry (VSI) + Phase Shifting Interferometry (PSI), and one device satisfies two types of measurement needs: PSI phase-shifting interferometry: specialized in nanometer-level tiny heights and ultra-thin films, with extreme microscopic resolution; VSI vertical scanning interferometry: suitable for measuring workpieces with large height differences and large steps, with sufficient range and no segmentation; Paired with a 450-700nm short-coherence white light source, it can effectively suppress multi-reflection stray light and has strong anti-interference ability. Multi-layer coatings and weakly reflective optical components can also output stable and clear interference signals, and measurement results are true and reliable.

Semiconductor industry: wafer, micro-nano chip 3D topography, step height inspection; Precision optics: roughness and film thickness measurement of optical lenses, lens elements, coating components; New material coatings: thickness and surface profile analysis of various reflective coatings and functional films; Scientific research laboratories: micro-nano structure, precision component topography characterization experiments

Two core measurement modes, full coverage of large and small topography; no probe contact with the sample is required, non-destructive inspection of fragile/scratch-prone workpieces such as wafers, ultra-thin lenses, and soft coatings, completely eliminating sample loss and greatly reducing inspection costs.; The whole machine is equipped with an LED white light source with a center wavelength of 550nm, with key performance indicators maxed out, benchmarking against the industry's top level; vertical resolution <1nm, repeated measurement error <10nm, truly nanometer-level precision; 500μm wide range, high-low difference microstructures require no multiple positioning measurements; scanning speed 100μm/s, single acquisition time <10s, balancing precision and inspection efficiency; follows NIST traceable standards, with built-in automatic calibration algorithms, batch inspection data is uniformly traceable, meeting the strict quality inspection specifications of the semiconductor and optical industries.; Industrial-grade body design, versatile for both laboratory and production line deployment; specially optimized for dual scenarios of industrial mass production and scientific research laboratories, with maximum installation adaptability:; Built-in active vibration isolation platform: unaffected by workshop vibration environments, no need to build an additional anti-vibration table; Dual installation methods: supports both horizontal and vertical placement, easily connecting to automated production lines and experimental workbenches; Compact integrated body: overall dimensions 120×80×65cm, weight ≤58kg, small footprint, flexible deployment; The whole machine is a complete set integrating light source, interferometer host, and control unit, ready to use out of the box, no complex optical path debugging required.; Wavelength Opto-Electronic has been deeply engaged in the optical field for many years, and the core optical path and measurement algorithms of the white light interferometer are all independently developed, with the entire chain from light source, objective lens to calibration system controllable. The equipment undergoes multiple rounds of precision calibration before leaving the factory, with complete after-sales technical support, and can customize exclusive measurement solutions according to customer workpiece dimensions and production line automation needs.