white-light series
The WLI series of white light interferometers are based on white light interferometry;
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Overview
Specifications
| Parameter | Value |
|---|---|
| Objective Lens | Infinite interference mirrors 2.5X, 5X, 10X, 20X, 50X (other customable); Infinite intervention lenses 10X (20X optional) |
| Lateral Resolution | 0.4um ~10.2um, related to selected mirrors |
| Step measurements | Accuracy 0.75%, repetition 0.1% 10 |
| Vertical Resolution | <0.1nm |
Datasheet
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Supplier Information
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