Large-Aperture Laser Interferometer
Measurement path 1: 100mm-aperture measurement system; measurement path 2: 300mm or 600mm-aperture flat measurement system. The large-aperture flat measurement system can be configured with a large-aperture flat transmission reference (TF) and a large-aperture flat reflection reference (RF). The large-aperture interferometer beam expansion system uses core surface figure correction technology to achieve key specifications such as the collimation of large-aperture beams and the quality of the outgoing wavefront.
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