Laser Displacement Sensor SL Series

DC differential transformer displacement transmitter The displacement sensor adopts the principle of DC differential transformer and can convert linear mechanical displacement into electrical signals. The displacement sensor has outstanding characteristics of small size, light weight, high and low temperature resistance, temperature shock resistance, vibration resistance, impact resistance, etc. It also has the characteristics of resistance to salt spray, steady-state damp heat, underwater immersion and other environmental test conditions. It can be widely used in machinery manufacturing, mining engineering, scientific research, national defense and military industry and other fields

Spectral confocal sensor. Spectral confocal sensors use the principle of axial chromatic aberration to achieve non-contact, high-precision measurement of the displacement and thickness of objects as well as the film thickness of transparent materials. Compared with traditional laser displacement sensors, spectral confocal sensors are immune to interference from the surface material of the measured object (specular, diffuse, transparent) and ambient light. Measurement accuracy can reach the sub-micron level and the maximum measurement frequency is 10 kHz. Our sensor probes cover a variety of measurement ranges from 100 μm to 50 mm, and the matching controller features multi-channel synchronous acquisition capability. They are widely used in industrial scenarios such as semiconductor wafer thickness inspection, glass cover flatness measurement, and tolerance sorting of precision components.

The AP series features high-precision measurement, high-speed sampling, stable measurement regardless of material, and flexible and easy use.; The AP series features an ultra-small size and ultra-high angle characteristics; various probe models such as high-intensity and vacuum-use probes can meet the inspection needs of different scenarios. The AP series controller supports multiple channels and multiple communication methods to meet the data communication scenarios of various devices.; The equipment can be widely used for height, thickness, displacement, profile, vibration and other measurements.

Face: One-sided polishing Lithographic Pattern Accuracy: 3±1um Dimensional Machining Accuracy: ±0.05mnm