grating force-controlled CNC polishing system
This equipment uses an industrial-grade six-axis robotic arm as the motion execution unit, equipped with a high-response force-control polishing module and a digital process control system, forming an intelligent optical element processing platform. The robotic arm positioning accuracy reaches ±0.02mm, with repeat positioning accuracy better than ±0.01mm, combined with a 0.1N-class closed-loop force control system to ensure dynamic stability during processing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Machined Element Type | Plane/spherical/aspherical/off-axis aspherical/freeform surfaces; etc. |
| Machined Element Shape | Round/ellipse/rectangle/rounded rectangle/sector/polygon/racetrack/irregular hole shapes, etc. |
| Machined Element Aperture | ≤800mm (2000 custom workpiece plate) |
| Load Capacity | ≤100KG |
| Max. Component Thickness | ≤150mm |
| Machining Precision | PV better than 60nm, RMS better than 12nm |
| Machining Repeatability | PV better than 60nm@2σ |
| Polished Surface Roughness | Ra≤0.5nm |
| Surface Cleanliness | Better than Grade III |
| Robotic Arm Body | ABB IRB 6700 200 robotic arm |
| Workpiece Stage | Tabletop diameter 800mm, aluminum alloy, anodized surface |
| Precision Force-Controlled Polishing Head | Polishing force controlled by a voice coil motor |
| Polishing Slurry Circulation Monitoring System | Polishing slurry stirring; circulation; filtration; with liquid level; concentration; and temperature monitoring |
| Small Tool Polishing Module | Fine grinding plates and polishing plates, five each, diameter D20 mm-D60 mm |
| Bonnet Polishing Module | One each for radii R20mm-R40mm |
| Process Software | Includes process database; free permanent updates |
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Datasheet
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