Chromatic Confocal Sensor
Spectral confocal sensor. Spectral confocal sensors use the principle of axial chromatic aberration to achieve non-contact, high-precision measurement of the displacement and thickness of objects as well as the film thickness of transparent materials. Compared with traditional laser displacement sensors, spectral confocal sensors are immune to interference from the surface material of the measured object (specular, diffuse, transparent) and ambient light. Measurement accuracy can reach the sub-micron level and the maximum measurement frequency is 10 kHz. Our sensor probes cover a variety of measurement ranges from 100 μm to 50 mm, and the matching controller features multi-channel synchronous acquisition capability. They are widely used in industrial scenarios such as semiconductor wafer thickness inspection, glass cover flatness measurement, and tolerance sorting of precision components.
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