Reticle

Overall Dimensions: Φ340 mm × 25 mm Mirror Aperture: Φ320mm Travel: ±2′/±500v

The fast steering mirror system is a precision optomechatronic device for beam control.

Material: H-K9L(BK7) / Quartz / CaF2 Optical Coating: Front Face: Multilayer Dielectric Coating (R:T=1:1); Back Face: Multilayer Antireflection Coating Surface Figure Accuracy: λ/10

This plate beamsplitter is made by depositing a multilayer dielectric coating on a parallel or wedged substrate.

Material: Various Optical Materials Surface Figure Accuracy: ≤1/10λ Effective Size: 98%

A point source placed at the focus produces reflected rays parallel to the mirror's principal axis.

Diameter Tolerance: +0.0/-0.2 mm Thickness Tolerance: ±0.2 mm Clear Aperture: >90 %

Brewster angle windows are uncoated substrates used in Brewster angle optical systems. They are used to separate S-polarized light and P-polarized light. When placed at the Brewster angle, the P-polarized light component will pass through the window 100%, while the S-polarized light component will be reflected 20%. MT-Optics provides Brewster windows made of BK7 and UV fused silica.

Composition - SiO2 [Synthetic Quartz]: 100% OH Content [Synthetic Quartz]: <100ppm Impurities [Synthetic Quartz]: Each of the Eight Impurity Elements Al, Ca, Cu, Fe, Na, K, Li and Mg in the Quartz-glass Substrate Is <0.01ppm

A blank mask becomes a photomask after a pattern is formed on its surface;