Displacement Transmitter

Spectral confocal sensor. Spectral confocal sensors use the principle of axial chromatic aberration to achieve non-contact, high-precision measurement of the displacement and thickness of objects as well as the film thickness of transparent materials. Compared with traditional laser displacement sensors, spectral confocal sensors are immune to interference from the surface material of the measured object (specular, diffuse, transparent) and ambient light. Measurement accuracy can reach the sub-micron level and the maximum measurement frequency is 10 kHz. Our sensor probes cover a variety of measurement ranges from 100 μm to 50 mm, and the matching controller features multi-channel synchronous acquisition capability. They are widely used in industrial scenarios such as semiconductor wafer thickness inspection, glass cover flatness measurement, and tolerance sorting of precision components.

The AP series features high-precision measurement, high-speed sampling, stable measurement regardless of material, and flexible and easy use.; The AP series features an ultra-small size and ultra-high angle characteristics; various probe models such as high-intensity and vacuum-use probes can meet the inspection needs of different scenarios. The AP series controller supports multiple channels and multiple communication methods to meet the data communication scenarios of various devices.; The equipment can be widely used for height, thickness, displacement, profile, vibration and other measurements.

Laser displacement sensors that meet various online scenarios, with high precision, high sampling rate and multiple models to solve most application needs! The diversity of product models can handle most measurement needs, stably measuring most objects of various colors, materials and surface conditions.

Face: One-sided polishing Lithographic Pattern Accuracy: 3±1um Dimensional Machining Accuracy: ±0.05mnm