e5
The ULVAC e5 is a high-performance vacuum system designed for advanced applications in thin film deposition and material processing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chamber Size | 500mm x 500mm |
| Vacuum Level | ≤10^-6 Pa |
| Power Supply | AC200V, 50/60Hz |
| Control System | Touchscreen interface |
| Deposition Rate | Up to 10nm/min |
| Target Material | Various metals and alloys |
| Cooling System | Water-cooled |
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