M1 Probe Platform System
The M1 Probe Platform System is a cutting-edge automated probe platform designed for precise and efficient testing of semiconductor chips. It integrates advanced shielding, vibration isolation, and temperature control technologies to ensure high accuracy and reliability.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range X-axis | 301mm |
| Travel Range Y-axis | 501mm |
| Travel Range Z-axis | 20mm |
| Travel Range Theta-axis | 10° |
| Positioning Accuracy X-axis | ≤1μm |
| Positioning Accuracy Y-axis | ≤0.05μm |
| Positioning Accuracy Z-axis | ≤1μm |
| Positioning Accuracy Theta-axis | ±0.003° |
| Speed X-axis | ≥50mm/s |
| Speed Y-axis | ≥50mm/s |
| Speed Z-axis | ≥20mm/s |
| Maximum Speed X-axis | 150mm/s |
| Maximum Speed Y-axis | 150mm/s |
| Maximum Speed Z-axis | 35mm/s |
| Shielding Capability-Light Shielding | ≥150dB |
| Shielding Capability-EMI Shielding | ≥20dB 0.5-20GHz |
| Shielding Capability-Spectral Noise Level | ≤-150dBVrms/√Hz (≤1MHz) |
| Shielding Capability-System AC Noise | ≤15mVp-p (≤1GHz) |
| Vibration Isolation-Vertical Natural Frequency | 2.5-2.7Hz |
| Vibration Isolation-Horizontal Natural Frequency | 2.0-4.5Hz |
| Vibration Isolation-Vertical Damping Ratio | 6%-20% |
| Vibration Isolation-Horizontal Damping Ratio | 5%-6% |
| Vibration Isolation-Air Supply Pressure | 0.3-0.5Mpa |
| Vibration Isolation-Maximum Load | 1600kg |
| Vibration Isolation-Isolation Efficiency | 5%-6% |
| Vibration Isolation-Response Time to External Impact | <1s |
| Microscope-Front-CCD or CMOS Quantity | 3 |
| Microscope-Front-Travel Range | 12.5mm |
| Microscope-Front-Movement Resolution | <2μm |
| Microscope-Front-Maximum Speed | 5mm/s |
| Microscope-Front-Magnification Range | 500-2000x |
| Microscope-Front-Typical Optical Image Resolution | Physical 11μm, calculation algorithm achieves 5.5μm |
| Microscope-Front-Virtual Calculation | 10 EOULU proprietary algorithms |
| Microscope-Rear-CCD or CMOS Quantity | 1 |
| Microscope-Rear-Travel Range | Same as object field of view |
| Microscope-Rear-Movement Resolution | <2μm |
| Microscope-Rear-Maximum Speed | 5mm/s |
| Microscope-Rear-Magnification Range | 200x |
| Microscope-Rear-Typical Optical Image Resolution | 4.5μm |
| Microscope-Rear-Virtual Calculation | 3 EOULU proprietary algorithms |
| Chuck-Temperature Range | Room temperature, -60°C to 300°C |
| Chuck-Temperature Stability | ±1°C |
| Chuck-Temperature Resolution | 0.1°C |
| Chuck-Normal Temperature Leakage Current Triax Chuck | ≤231fA |
| Chuck-Normal Temperature Noise Triax Chuck | ≤42fA |
| Robot Arm Travel Range-R Axis | 630mm |
| Robot Arm Travel Range-Theta Axis | 340° |
| Robot Arm Travel Range-Z Axis | 300mm |
| Translation Speed-R Axis | 430mm/s |
| Translation Speed-Theta Axis | 240mm/s |
| Translation Speed-Z Axis | 180mm/s |
| Maximum Speed-R Axis | 640mm/s |
| Maximum Speed-Theta Axis | 340mm/s |
| Maximum Speed-Z Axis | 250mm/s |
| Resolution-R Axis | 10μm or less |
| Resolution-Theta Axis | 0.0015° |
| Resolution-Z Axis | 2μm |
| Robot Arm Weight Repeatability | ±0.1mm or less |
| Calibration Accuracy | Within ±0.1mm from center, ±0.1° from edge |
| Calibration Time | ≤3s |
| First Load | 79s |
| UnLoad | 58s |
| Next Load | 46s |
| Typical Dimensions (W×D×H) | ~1650×1600×1560mm |
| Main Unit Weight | ~750kg |
| High-Low Temperature Controller (Liquid Cooling) Weight | ~245kg |
| High-Low Temperature Controller (Air Cooling) Weight | ~295kg |
| Installation Environment Requirements-Installation Temperature | 17°C to 25°C, ±0.5°C |
| Installation Environment Requirements-Installation Humidity | 20%-60% |
| Installation Environment Requirements-Storage Temperature | 10°C to 30°C |
| Installation Environment Requirements-Storage Humidity | ≤50% |
| Installation Environment Requirements-On-site Requirements-Horizontal | ≤100micrometers/sec rms |
| Installation Environment Requirements-On-site Requirements-Vertical | ≤200kgf |
| Power Requirements-Probe Platform | Single-phase 220VAC (Voltage fluctuation ±7%-10%), 50/60Hz, 1800VA, current 10A max |
| Power Requirements-High-Low Temperature Control System | Three-phase 380VAC (Voltage fluctuation ±7%-10%), 50/60Hz, current 32A max |
| Compressed Dry Air-Normal Temperature Probe Platform | Air pressure: 4.5-8bar (65-116psi), minimum temperature: -20°C |
| Compressed Dry Air-High-Low Temperature Probe Platform | Air pressure: 4.5-8bar (65-116psi), minimum temperature: -70°C |
| Accessory Temperature Controller-Temperature Range | -60°C to 300°C |
Applications
Key Features
Datasheet
Supplier Information
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