MPI TS2500-SE
The MPI TS2500-SE is a fully automated probe system designed for accurate and reliable 24/7 production tests at a wide temperature range within the MPI ShieldEnvironment™.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chuck XY Stage Travel Range | 220mm×490mm (8.66×19.29in) |
| Chuck XY Stage Resolution | 0.2μm |
| Chuck XY Stage Accuracy | <2.0μm (0.08mils) |
| Chuck XY Stage Repeatability | <1μm |
| Chuck XY Stage Drive | Closed-loop high precision stepper motors |
| Chuck XY Stage Speed | Slowest: 10μm/sec | Fastest: 50μm/sec |
| Chuck Z Stage Travel Range | 30mm (1.18in) |
| Chuck Z Stage Resolution | 0.2μm |
| Chuck Z Stage Accuracy | <2.0μm (0.08mils) |
| Chuck Z Stage Repeatability | <1μm |
| Chuck Z Stage Drive | Closed-loop high precision stepper motor |
| Chuck Z Stage Speed | Slowest: 10μm/sec | Fastest: 20μm/sec |
| Linear Guide | Precision ball bearings |
| Chuck Theta Stage Travel Range | ±5.0° |
| Chuck Theta Stage Resolution | 0.0001° |
| Chuck Theta Stage Accuracy | <2.0μm (measured at the edge of the 200mm chuck) |
| Chuck Theta Stage Repeatability | <1μm |
| Chuck Theta Stage Drive | High resolution stepper motor with linear encoder feedback system |
| Microscope XY Travel Range | 50×50mm / 100×50mm / 200×200mm |
| Microscope XY Resolution | 1μm (0.04mils) |
| Microscope XY Repeatability | <2μm (0.08mils) |
| Microscope XY Accuracy | <5μm (0.2mils) |
| Microscope Z Travel Range | 140mm |
| Microscope Z Resolution | 0.05μm (0.002mils) |
| Microscope Z Repeatability | <2μm (0.08mils) |
| Microscope Z Accuracy | <4μm (0.16mils) |
| Probe Platen Material | Nickel plated steel |
| Chuck to ShieldGuard Height | min. 5mm |
| Probe Platen Feature | Integrated Air-Cool platen control for thermal stability of MicroPositioners |
| Max. No of MicroPositioners | 8×DC or 4×DC + 2×RF or 2×DC + 4×RF or 4×DC + 4×RF Setup |
| ShieldEnvironment™ EMI Shielding | ≥30dB (typical) @1kHz to 20GHz |
| ShieldEnvironment™ Light Attenuation | ≥130dB |
| ShieldEnvironment™ Spectral Noise Floor | ≤-180dBVrms/rtHz (≤1MHz) |
| ShieldEnvironment™ System AC Noise | ≤5mVp-p (≤1GHz) |
| Wafer Size | 100, 150, 200mm (4, 6, 8in) or 75, 100, 150mm (3, 4, 6in) |
| Cassette Type | Semi E1 |
| Cassette Capacity | 2 |
| Cassette Loading Time | 15sec cassette (wafer scan) |
| First Wafer Loading Time | 40sec (cassette→pre-alignment→chuck) |
| Next Wafer Exchange Time | 40sec (chuck→wafer unload and next wafer→chuck) |
| Thin Wafer Exchange Function | Smart recipe for thin wafer lifting |
| Wafer Support | Conventional and thin wafer down to 50μm |
| Pre-aligner | Optical |
| Pre-aligner | support notch and flats |
| Wafer ID Reader (Optional) | Optical |
| Wafer ID Reader (Optional) | can configure top or bottom |
| Wafer Scanning | Laser scanning for wafer indexing |
| System Dimensions | 1430×1330×2465mm (56.3×52.4×97.0in) |
| Weight | 950kg |
| CPU | Intel Core i9 |
| RAM | 16GB |
| Operating System | Windows 11 Enterprise LTSC (English) 64bit |
| Storage | 500GB SSD |
| LAN | 1×internal, 1×external TCP/IP port |
| USB Ports | 3×internal, 1×external |
| GPIB Interface | Optional |
| Power | 100-240V AC nominal; 50/60Hz |
| Vacuum | -0.9bar |
| Compressed Air | 6.0bar |
| Warranty | 12 months |
| Extended Service Contract | Contact MPI Corporation for more information |
Applications
Key Features
Datasheet
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