TS2000-IFE Series
The TS2000-IFE Series is a 200 mm automated probe system designed for mmW, load-pull, SiPH, and product engineering applications. It offers advanced features such as IceFreeEnvironment™, SENTIO® software, and high precision for wafer-level reliability testing.
Specification Snapshot
Capacitance
<750pF
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Overview
The TS2000-IFE Series is a 200 mm automated probe system designed for mmW, load-pull, SiPH, and product engineering applications. It offers advanced features such as IceFreeEnvironment™, SENTIO® software, and high precision for wafer-level reliability testing.
Specifications
| Parameter | Value |
|---|---|
| Chuck Dimensions | 220×490mm |
| Resolution | 0.2μm |
| Accuracy | ±2.0μm |
| Repeatability | ±1μm |
| XY Stage Drive | Closed-loop high precision stepper motors |
| Speed | 10mm/sec to 50mm/sec |
| Z Travel Range | 30mm |
| Z Resolution | 0.2μm |
| Z Accuracy | ±2.0μm |
| Z Repeatability | ±1.0μm |
| Microscope Movement Range | 50×50mm to 200×200mm |
| Microscope Resolution | 1μm |
| Microscope Repeatability | <2μm |
| Microscope Accuracy | <5μm |
| Probe Platen Material | Nickel plated steel |
| Platen Cooling | Fully integrated CDA cooling |
| Max. MicroPositioners | 10 DC or 4 DC + 4 RF |
| Power | 100-240VAC, 50/60Hz |
| Vacuum | -0.9bar |
| Compressed Air | 6.0bar |
| System Controller CPU | Intel® Core™ i7-7700, 3.6GHz |
| System Controller RAM | DDR4 2400MHz 16GB |
| System Controller Storage | SSD 500GB |
| System Controller OS | Windows 10 Professional |
| System Dimensions | 1210×1190×1570mm |
| System Weight | 800kg |
| Temperature range | -60°C to 300°C |
| Temperature Stability | ±0.5°C |
| Temperature Accuracy | ±1°C |
| Temperature Uniformity | <±1°C |
| Electrical Isolation | >0.5TΩ at 25°C |
| Capacitance | <750pF |
Applications
1. mmW applications 2. Load-pull measurements 3. Silicon photonics testing 4. IC design validation 5. Failure analysis in wide temperature ranges
Key Features
1. IceFreeEnvironment™ for negative temperature testing 2. SENTIO® software for intuitive operation 3. High precision and repeatability 4. Compact design for efficient space utilization 5. Advanced RF calibration capabilities
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Yingbo Scientific Instruments (Shanghai) Co., Ltd. is an enterprise focused on providing comprehensive solutions for semiconductor wafer-level testing systems, micro-nano science and other fields. It mainly provides advanced semiconductor testing systems and micro-nano scientific instruments and equipment to universities, scientific research institutes and enterprises and institutions, and is committed to bringing scientific research products with market prospects to the market.</p><p><br></p><p><br></p><p> At present, the company has become one of the few domestic companies that provides professional scientific instruments such as semiconductor wafer-level testing systems and micro-nano processing. In the fields of semiconductor wafer-level testing system solutions, micro-nano processing equipment, micro-nano characterization equipment, micro-nano field consumables, micro-nano processing and testing, micro-nano peripheral products and other related fields, the company has an experienced and highly skilled team that can excellently complete all-round services before, during and after sales. The company is headquartered in Shanghai, and has offices in Beijing and Shenzhen. It has established 8 after-sales service outlets in Wuhan, Xi'an, Chengdu, Hefei, Shenyang, Nanjing, Xiamen, Xuzhou and other places. The outlets across the country provide customers with a large number of high-quality equipment and after-sales services, and have won a good reputation and reputation in the semiconductor technology service industry.</p><p><br></p><p> The company adheres to the value concepts of innovation, integrity, professionalism and efficiency, and provides high-quality equipment and technical services to partners. In the future, the company will continue to recommend the introduction of innovative and efficient product instruments and contribute a small amount to the development of the motherland's semiconductor science industry!</p>
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