OPUS3 SE
OPUS3 SE is a high-precision wafer probing system designed for semiconductor testing applications. It supports 6-inch and 8-inch wafers and offers tri-temperature control for versatile testing environments.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wafer Size | 6&8inch |
| X,Y Probing Area | X:±115mm, Y:±115mm |
| Max Probing Force | 230kgf |
| XY Accuracy | X:±1.5μm, Y:±1.5μm |
| Tri-Temp | COLD:-40°C/-55°C, HOT:150°C/200°C, AMBIENT CONTROL:25°C |
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Key Features
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Supplier Information
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