OPAL-EC
The OPAL-EC is an advanced wafer-level edge-coupling test station designed for precise, repeatable, and automated testing of photonic integrated circuits (PICs). It offers high-throughput testing with traceable results, combining optical and electrical probing capabilities.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Size (H×W×D) | 1496mm×1448mm×1448mm |
| Mass (kg) | 1250 |
| Operating Temperature (°C) | 18-22 |
| Storage Temperature (°C) | 0-40 |
| Operating Humidity (RF) | 20%-60% |
| Storage Humidity (RF) | 10%-70%, non-condensing |
| Base | Granite base for passive vibration isolation |
| Optical Breadboard | Grid of M6 threaded mounting holes, 25mm hole spacing, black anodized |
| Workstation Computer | 3U rackmount industrial, Intel i7 CPU, 2×16GB RAM DDR5, 1TB SSD, Nvidia RTX 5060 GPU, 3 Ethernet ports, multiple USB ports, additional PCIe slots, Windows 11 Pro, mouse and keyboard included |
| Monitors | 2×27in |
| XY Axis Travel Range (mm) | 300 |
| XY Axis Resolution (μm) | 0.003 |
| XY Axis Accuracy (μm) | 0.75 |
| XY Axis Bi-directional Repeatability (μm) | 0.1 |
| XY Axis Maximum Process Speed (mm/s) | 100 |
| XY Axis Orthogonality (arcsec) | 1 |
| XY Axis Motor Type | Direct-drive linear motors, noncontact encoder |
| Z Axis Travel Range (mm) | 5 |
| Z Axis Resolution (μm) | 0.0008 |
| Z Axis Accuracy (μm) | 1.5 |
| Z Axis Bi-directional Repeatability (μm) | 0.1 |
| Z Axis Maximum Speed (mm/s) | 4 |
| Z Axis Motor Type | Direct-drive brushless linear motor |
| Rz Axis Resolution (arcsec) | 0.36arcsec;0.0001° |
| Rz Axis Accuracy (arcsec) | 80arcsec;0.02° |
| Rz Axis Repeatability (arcsec) | 3arcsec;0.0008° |
| Rz Axis Maximum Speed (rpm) | 600 |
| Rz Axis Motor Type | Direct-drive brushless rotary motor, mechanical bearing |
| Chuck Range (°C) | 5-200 |
| Chuck Resolution (°C) | 0.01 |
| Chuck Stability (°C) | ±0.05(≤25) and ±0.1(>25) |
| Chuck Heating Rate (°C/min) | 40 |
| Chuck Cooling Rate (°C/min) | -5 |
| Chuck Surface Flatness (μm) | <25 |
| Chuck Vacuum | 4 concentric vacuum zones |
| Chuck Electrical Surface | Floating |
| Chuck Electrical Surface | nickel or gold surface |
| Optical Head Travel Range (X axis, mm) | 20 |
| Optical Head Travel Range (Z axis, mm) | 11 |
| Optical Head Resolution (X axis, nm) | 1 |
| Optical Head Resolution (Z axis, nm) | 1 |
| Optical Head Repeatability (X axis, nm) | 50 |
| Optical Head Repeatability (Z axis, nm) | 50 |
| Optical Head Rotation Range (Rx axis, °) | 38 |
| Optical Head Rotation Range (Rz axis, °) | 105 |
| Optical Head Rotation Resolution (Rx axis, arcsec) | 0.04 |
| Optical Head Rotation Resolution (Rz axis, arcsec) | 0.04 |
| Optical Head Rotation Repeatability (Rx axis, arcsec) | 1.5 |
| Optical Head Rotation Repeatability (Rz axis, arcsec) | 1.5 |
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