Nanometer Capacitive Displacement Sensor System
This system integrates capacitive displacement sensors and controllers, offering high precision and stability for nanometer-level displacement measurement.
Specification Snapshot
Analog Output Bandwidth
10kHz
Dimensions
376×302.5×140 (without handles); 376×346.3×140 (with handles)
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Overview
This system integrates capacitive displacement sensors and controllers, offering high precision and stability for nanometer-level displacement measurement.
Specifications
| Parameter | Value |
|---|---|
| Operating Temperature | 10°C~50°C |
| Analog Voltage Output Range | -10V~+10V |
| Analog Output Bandwidth | 10kHz |
| Analog Output Interface | BNC |
| Digital Output Bandwidth | 1Hz~4kHz |
| Digital Output Format | USB/422 |
| Maximum Communication Rate | 5Mbit/s |
| Input Voltage | AC180~260V |
| Compatible Probes | All series capacitive probes |
| Maximum Channels | 6 |
| Weight | 1 channel 6kg, each additional channel adds 0.7kg |
| Dimensions | 376×302.5×140 (without handles); 376×346.3×140 (with handles) |
| Probe Dimensions | Varies by model (06L, 08L, 10L, 12L, 20L, 08, 10, 14) |
| Probe Operating Temperature | 10°C~50°C |
| Effective Measurement Diameter | Varies by model (2.5mm~20mm) |
| Equipotential Ring Thickness | Varies by model (1.05mm~1.75mm) |
| Minimum Measured Object Diameter | Varies by model (2mm~15mm) |
| Probe Weight | Varies by model (3g~30.2g) |
| Probe Material | Stainless steel (customizable with copper/aluminum alloy) |
| Connection Method | Integrated (2m cable) |
| Fixing Method | Varies by model (screw fixation, direct insertion, etc.) |
| RMS Resolution | Varies by model and bandwidth (e.g., 0.1nm~27nm) |
| Linearity | Varies by model and range (e.g., 0.05%) |
Applications
1. Precision machinery 2. Semiconductor manufacturing 3. Scientific research 4. Aerospace engineering
Key Features
1. High precision measurement 2. Wide range of applications 3. Modular design for flexible configuration 4. Durable and customizable materials
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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