SU8600 Series Scanning Electron Microscope
The SU8600 series scanning electron microscope offers high-resolution imaging and advanced analytical capabilities, suitable for various applications in materials science, semiconductor inspection, and biological research.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Secondary Electron Resolution | 0.6nm@15kV, 0.7nm@1kV |
| Magnification | 20-2,000,000× |
| Electron Gun | 冷阴极场发射枪, 支持技术间活动Function, Includes 低噪声模块系统 |
| Acceleration Voltage | 0.01-30kV |
| Detector | UD ExB混能滤波器, Includes SE/BSE信号 |
| Sample Chamber Size | 最大直径150mm |
| Sample Stage Movement Range | X:0-110mm, Y:0-110mm, Z:1.5-40mm, T:-5-70°, R:360° |
| Single Monitor Resolution | 1280×960 |
| Dual Monitor Resolution | 800×600 each, 1280×960 each |
| Fast Image Capture Mode | 40,960×30,720像素 |
| Main Unit Dimensions | 1,130(W)×1,750(H)×1,150(D)mm, 约660kg |
| ECO Unit Dimensions | 1,200(W)×1,210(H)×1,140(D)mm, 约625kg |
| Temperature | 15-30°C |
| Humidity | 低于65% RH (None凝露) |
| Power Supply | AC100-240V, 4kVA (M6低泄漏) |
| Cooling Water | 600-800kPa |
Applications
Key Features
Datasheet
Supplier Information
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