PHEMOS-X
PHEMOS-X is a high-performance emission analysis system designed for detecting low-light emissions from semiconductor devices with high sensitivity and precision. It features advanced cameras, display functions, and optical stage capabilities.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Main Unit Dimensions | 1656mm(W)×2000mm(H)×1247mm(D) |
| Main Unit Weight | Approx.1640kg |
| Operation Desk Dimensions 1 | 1000mm(W)×700mm(H)×800mm(D) |
| Operation Desk Weight 1 | Approx.39.2kg |
| Operation Desk Dimensions 2 | 1480mm(W)×700mm(H)×800mm(D) |
| Operation Desk Weight 2 | Approx.48.6kg |
| Line Voltage | Single phase 200V to 240V |
| Power Consumption | Approx.3300VA |
| Vacuum | 80kPa or more |
| Compressed Air | 0.6MPa to 0.7MPa |
| Optical Stage Working Range X | ±20mm |
| Optical Stage Working Range Y | ±20mm |
| Optical Stage Working Range Z | +80mm |
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Key Features
Datasheet
Supplier Information
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