MSA-650 IRIS Micro System Analyzer
The MSA-650 IRIS Micro System Analyzer is a cutting-edge optical measurement system designed for dynamic characterization of MEMS devices, enabling precise analysis of out-of-plane and in-plane motion within Si-capped MEMS structures.
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Overview
Specifications
| Parameter | Value |
|---|---|
| IR Capability | 1050nm |
| Real-time out-of-plane response measurement frequency range | up to 25MHz |
| Out-of-plane displacement resolution | Sub-picometer |
| In-plane motion measurement frequency range | up to 2.5MHz |
| In-plane displacement resolution | 30nm |
| Optical magnification | up to 50x |
| Probe beam intensity | 7.1% |
| Vibration measurement bandwidth | 25MHz |
| Vibration measurement amplitude resolution | 100fm/√Hz |
| Si cap thickness | 20-200μm |
| MEMS structure thickness | 10-20μm |
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